Lateral MOSFET

ABSTRACT

A lateral MOSFET formed in a substrate of a first conductivity type includes a gate formed atop a gate dielectric layer over a surface of the substrate, a drain region of a second conductivity type, a source region of a second conductivity type, and a body region of the first conductivity type which extends under the gate. The body region may have a non-monotonic vertical doping profile with a portion located deeper in the substrate having a higher doping concentration than a portion located shallower in the substrate. The lateral MOSFET may be drain-centric, with the source region and an optional dielectric-filled trench surrounding the drain region.

CROSS-REFERENCE TO RELATED APPLICATIONS

This application is related to application Ser. No. 11/444,102, titled“Isolation Structures For Semiconductor Integrated Circuit SubstratesAnd Methods Of Forming The Same,” filed on May 31, 2006, which isincorporated herein by reference in its entirety.

BACKGROUND OF THE INVENTION

In the fabrication of semiconductor integrated circuit (IC) chips, it isfrequently necessary to electrically isolate devices that are formed onthe surface of the chip. There are various ways of doing this. One wayis by using the well-known LOCOS (Local Oxidation Of Silicon) process,wherein the surface of the chip is masked with a relatively hardmaterial such as silicon nitride and a thick oxide layer is grownthermally in an opening in the mask. Another way is to etch a trench inthe silicon and then fill the trench with a dielectric material such assilicon oxide, also known as trench isolation. While both LOCOS andtrench isolation can prevent unwanted surface conduction betweendevices, they do not facilitate complete electrical isolation.

Complete electrical isolation is necessary to integrate certain types oftransistors including bipolar junction transistors and variousmetal-oxide-semiconductor (MOS) transistors including power DMOStransistors. Complete isolation is also needed to allow CMOS controlcircuitry to float to potentials well above the substrate potentialduring operation. Complete isolation is especially important in thefabrication of analog, power, and mixed signal integrated circuits.

Although conventional CMOS wafer fabrication offers high densitytransistor integration, it does not facilitate complete electricalisolation of its fabricated devices. In particular, the NMOS transistorcontained in conventional CMOS fabricated in a P-type substrate has itsP-well “body” or “back-gate” shorted to the substrate and thereforecannot float above the substrate potential. This restriction issubstantial, preventing the use of an NMOS transistor as a high-sideswitch, an analog pass transistor, or as a bidirectional switch. It alsomakes current sensing more difficult and often precludes the use ofintegral source-body shorts needed to make NMOS devices more avalancherugged.

Moreover since the P-type substrate in conventional CMOS is biased tothe most negative on-chip potential (defined as “ground”), every NMOSdevice is necessarily subjected to unwanted substrate noise.

The need for complete electrical isolation is described in detail inrelated application Ser. No., 11/298,075, entitled “Isolation StructuresFor Semiconductor Integrated Circuit Substrates And Methods Of FormingThe Same,” filed Dec. 9, 2005, by R. K. Williams et al., which isincorporated herein by reference in its entirety.

Conventional Isolated Process Technologies

Complete electrical isolation of integrated devices is typicallyachieved using triple diffusions, epitaxial junction, or dielectricisolation. The most common form of complete electrical isolation isjunction isolation. While not as ideal as dielectric isolation whereoxide surrounds each device or circuit, junction isolation hashistorically offered the best compromise between manufacturing cost andisolation performance.

With junction isolation, electrically isolating CMOS requires a complexstructure requiring the growth of an N-type epitaxial layer atop aP-type substrate surrounded by an annular ring of deep P-type isolationelectrically connecting to the P-type substrate to completely isolate anN-type epitaxial island by P-type material below and on all sides.Growth of epitaxial layers is slow and time consuming, representing thesingle most expensive step in semiconductor wafer fabrication. Theisolation diffusion is also expensive, formed using high temperaturediffusion for extended durations (up to 18 hours). To be able tosuppress parasitic devices, a heavily doped N-type buried layer NBL mustalso be masked and selectively introduced prior to epitaxial growth.

To minimize up-diffusion during epitaxial growth and isolationdiffusion, a slow-diffusing dopant such as arsenic (As) or antimony (Sb)is chosen to form the N-type buried layer (NBL). Prior to epitaxialgrowth however, this NBL layer must be diffused sufficiently deep toreduce its surface concentration, or otherwise the concentration controlof the epitaxial growth will be adversely impacted; Because the NBL iscomprised of a slow diffuser, this pre-epitaxy diffusion process cantake more than ten hours.

Only after isolation is complete can conventional CMOS fabricationcommence, adding considerable time and complexity to the manufacturingof junction-isolated processes compared to conventional CMOS.

Since junction isolation fabrication methods rely on high-temperatureprocessing to form deep-diffused junctions and to grow epitaxial layers,these high-temperature processes are expensive and difficult tomanufacture, and are incompatible with large diameter wafermanufacturing, exhibiting substantial variation in device electricalperformance and preventing high transistor integration densities.Another disadvantage of junction isolation is the area wasted by theisolation structures and otherwise not available for fabricating activetransistors or circuitry. As a further complication, with junctionisolation, the design rules (and the wasted area) depend on the maximumvoltage of the isolated devices. Obviously, conventional epitaxialjunction isolation, despite its electrical benefits, is tooarea-wasteful to remain a viable technology option for mixed signal andpower integrated circuits.

The limitations of conventional junction isolation are described ingreater detail in the aforementioned application Ser. No. 11/298,075.

An Epi-less Fully-Isolated BCD Process with Contouring Implants

As disclosed in U.S. Pat. Nos. 6,855,985, 6,900,091 and 6,943,426 byRichard K. Williams, et. al., each of which is incorporated herein byreference, a fully-isolated process integrating CMOS, bipolar and DMOStransistors can be achieved without the need for high temperaturediffusions or epitaxy. The principle of this modular BCD process relieson high-energy (MeV) ion implantation through contoured oxides toproduce self-forming isolation structures with virtually nohigh-temperature processing required. The principle of conformal ionimplantation through contoured oxides is the concept that by implantingthrough a thicker oxide layer dopant atoms will be located closer to thesilicon surface and by implanting through a thinner oxide layer, theimplanted atoms will be located deeper in the silicon, away from thesurface. This low-thermal budget process benefits from “as-implanted”dopant profiles that undergo little or no dopant redistribution since nohigh-temperature processes are employed.

Dopants, implanted through LOCOS field oxide, form conformal isolationstructures that in turn are used to enclose and isolate multi-voltageCMOS, bipolar transistors and other devices from the common P-typesubstrate. The same process is able to integrated bipolar transistors,and a variety of double-junction DMOS power devices, all tailored usingconformal and chained-ion implantations of differing dose and energy.

While this epi-less low thermal budget technique has many advantagesover non-isolated and epitaxial junction isolated processes, itsreliance on LOCOS imposes certain limitations on its ability to scale tosmaller dimensions and higher transistor densities.

To improve CMOS transistor integration density, the well-known bird'sbeak taper that appears at the edges of LOCOS structures must be reducedinto a more vertical structure so that the devices can placed moreclosely for higher packing densities. A narrow LOCOS bird's beak,however, causes the width of the isolation sidewall to becomeunacceptably narrowed and isolation quality to be sacrificed. Atdimensions much larger than photolithographic limitations, otherpractical limitations of LOCOS become manifest. Such limitations includedistorted field oxide shapes, excessive oxide thinning, high stress,high surface state charge, poor quality gate dielectrics and more.

What is needed is new strategy for implementing a fully-isolated,low-thermal-budget, epi-less integrated circuit process, that eliminatesthe aforementioned limitations of LOCOS.

BRIEF SUMMARY OF THE INVENTION

An isolation structure of this invention includes a submerged floorisolation region, a dielectric-filled trench located above the floorisolation region, and a sidewall isolation region extending from thebottom of the trench to the floor isolation region, all of whichtogether enclose an isolated pocket of the substrate. The floorisolation region is formed by implanting dopant into the substrate andthe sidewall isolation region is likewise formed by implanting dopantthrough the bottom of the trench before the trench is filled with adielectric material. The sidewall isolation region may be formed by aseries of implants at different implant energies. These processes arecarried out in a low-temperature environment so that the implantedregions remain essentially the same size and shape as they were whenimplanted. No epitaxial or other high-temperature process is used. Theprocesses are modular in the sense that the steps may be carried out inany order, although it is preferable to etch the trench beforeimplanting the sidewall isolation region.

The invention includes the fabrication of a variety of devices in theisolated pocket, including MOSFETs, JFETs, bipolar transistors, anddiodes. Non-monotonic wells including one or more deep portions that aremore heavily doped than one or more shallow portions may be used tooptimize device performance. For example, an N-channel MOSFET may beformed in a P-type well of this type, or a P-channel MOSFET may beformed in an N-type well of this type. The collector or base region of abipolar transistor may comprise a well of this type and may befabricated in the same process step that is used to fabricate the wellfor a MOSFET.

In one alternative embodiment of the invention, the trench is lined witha dielectric layer and contains a conductive material instead of beingfilled with a dielectric material. This allows electrical contact to thesidewall and floor isolation regions via the trench.

The invention also includes a lateral MOSFET formed in a substrate of afirst conductivity type. The MOSFET includes a gate formed atop a gatedielectric layer over a surface of the substrate, a drain region of asecond conductivity type, a source region of a second conductivity type,and a body region of the first conductivity type which extends under thegate. The body region may have a non-monotonic vertical doping profilewith a portion located deeper in the substrate having a higher dopingconcentration than a portion located shallower in the substrate. Thelateral MOSFET may be drain-centric, with the source region and adielectric-filled trench and sidewall region surrounding the drainregion.

BRIEF DESCRIPTION OF THE SEVERAL VIEWS OF THE DRAWING

FIG. 1A is a cross-sectional view of a Type-II epi-less isolationstructure without shallow trenches.

FIG. 1B is a cross-sectional view of a Type-II epi-less isolationstructure with shallow trenches.

FIG. 2A is a chart of the process flow for the fabrication of anepi-less isolated bipolar-CMOS-DMOS (BCD) arrangement through theformation of the gate.

FIG. 2B is a chart of the process flow for the fabrication of anepi-less isolated BCD arrangement from the shallow implants.

FIG. 3A is a cross-sectional view of a multi-voltage isolated CMOSfabricated using the Type-II trench isolation process.

FIG. 3B is a cross-sectional view of P-base and P-well type NPN bipolartransistors fabricated using the Type-II trench isolation process.

FIG. 3C is a cross-sectional view of N-base and N-well type PNP bipolartransistors fabricated using the Type-II trench isolation process.

FIG. 4A is a cross-sectional view of a non-isolated high-voltageextended LDD N-channel lateral DMOS device fabricated using the Type-IItrench isolation process.

FIG. 4B is a cross-sectional view of a drain-centric isolatedhigh-voltage extended LDD N-channel lateral DMOS device fabricated usingthe Type-II trench isolation process.

FIG. 4C is a cross-sectional view of a source-centric isolatedhigh-voltage extended LDD N-channel lateral DMOS device fabricated usingthe Type-II trench isolation process.

FIG. 5 is a cross-sectional view of a high-voltage extended LDDP-channel lateral DMOS device fabricated using the Type-II isolationprocess.

FIG. 6A is a cross-sectional view of an isolated common anode P-Njunction rectifier fabricated using the Type-II isolation process.

FIG. 6B is a cross-sectional view of an isolated segmented anode P-Njunction rectifier fabricated using the Type-II isolation process.

FIG. 7A is a cross-sectional view of an isolated high-voltage P-channelJFET.

FIG. 7B is a cross-sectional view of an isolated low-voltage P-channelJFET.

FIG. 8 is a cross-sectional view of PNP and NPN polysilicon-emitterbipolar transistors.

FIGS. 9A-9F illustrate design rules relating to Type-II isolation,including the separation between a surface P+ region and a DN floorisolation region (FIG. 9A); the N-type well approaching the NI region(FIG. 9B); the N-type well touching the NI region (FIG. 9C); the N-typewell substantially overlapping the NI region (FIG. 9D); the N-type welloverlapping the DN floor isolation region (FIG. 9E); and the formationof a P-type pocket above the N-type well (FIG. 9F).

FIGS. 10A-10F are graphs illustrating dopant profiles at variousvertical cross sections of FIGS. 9A-9F.

FIG. 11A-11C are graphs illustrating dopant profiles of different formsof the upper portion of an N-type well inside a Type-II isolationstructure.

FIG. 12A is a cross-sectional view illustrating the fabrication of amedium depth DP implant and a DN floor isolation region.

FIG. 12B is a cross-sectional view illustrating the fabrication of adielectric-filled trench and underlying NI regions.

FIG. 13A is a cross-sectional view of high voltage N-channel andP-channel LDD MOSFETS with a medium-depth DP implant.

FIG. 13B is a cross-sectional view of NB and NW base PNP transistorswith a medium-depth DP implant.

FIG. 14A is a cross-sectional view of an LDD N-channel MOSFET with asymmetric drift region.

FIG. 14B is a cross-sectional view of an LDD N-channel MOSFET with anasymmetric drift region.

FIG. 14C is a cross-sectional view of an LDD N-channel MOSFET with anasymmetric drift and a drain region abutting an isolation trench.

FIG. 14D is a cross-sectional view of an LDD N-channel MOSFET with driftregions formed by sidewall spacers.

FIG. 14E is a cross-sectional view of an LDD N-channel MOSFET with anasymmetric drift and a central drain region.

FIGS. 15A-15E are plan views of the MOSFETs shown in FIGS. 14A-14E,respectively.

FIG. 16A is a cross-sectional view of a CMOS pair and a DMOS isolatedusing an alternative type of isolation according to the invention.

FIG. 16B is a cross-sectional view of two NPNs and a PNP isolated usingthe alternative type of isolation.

DETAILED DESCRIPTION OF THE INVENTION

To eliminate the aforementioned limitations associated with prior artprocesses, the devices described herein are isolated using shallow,medium, or deep trench isolated regions (so called STI or DTI) insteadof LOCOS. These dielectric-filled trenches are combined with high-energyand chained ion implantations to form floor isolation and to enhancesidewall isolation voltage capability.

The novel combination of STI or DTI for sidewall isolation and highenergy implanted floor isolation represent in various forms, both methodand apparatus inventive matter for integrating and isolating devices athigh densities, without the need for long high-temperature diffusion orexpensive epitaxial deposition. The isolation structures produced inthis manner can be divided into three categories or “types”, which areherein defined as follows:

-   -   Type-I isolation: a combination of deep high-energy ion        implanted floor isolation and a dielectric-filled trench        sidewall isolation, with the option for shallow trenches not        associated with the sidewall isolation    -   Type-II isolation: a combination of deep high-energy ion        implanted floor isolation and dielectric-filled trench sidewall        isolation with additional isolation implants made into the        bottom of the trench.    -   Type-III isolation: a combination of deep high-energy ion        implanted floor isolation, and chained implant formed junction        sidewall isolation with dielectric-filled trenches not        necessarily associated with the sidewall isolation

The inventive methods described herein detail the fabrication andconstruction of bipolar, CMOS and DMOS devices in a fully-isolated BCDprocess incorporating Type-II isolation structures.

application Ser. No. 11/444,102, entitled “Isolation Structure ForIntegrated Circuits. And Modular Methods Of Forming The Same”,incorporated herein by reference, describes the detailed fabrication ofthe type I, II and III trench isolation structures.

Type-II Epi-Less Isolation

The structure of Type-II epi-less isolation, shown in device isolationstructure 1 of FIG. 1A, comprises N-type floor isolation regions 3A and3B formed in a P-type substrate 2 with dielectric-filled trenches 4Athrough 4D and sidewall N-type doped isolation (NI) regions 5A through5D formed at the bottom of trenches 4A-4D. An optional P-type region 7is formed in substrate 2 at a depth shallower than, deeper than, orequal to floor isolation regions 3A and 3B. The result is the formationof P-type pockets 6A, 6B, and 6D, which are electrically isolated fromP-type substrate 2 by a combination of junction isolation at the bottomof each pocket and dielectric filled trenches circumscribing thesidewalls of each pocket.

In a preferred embodiment of this invention, floor isolation regions 3Aand 3B are formed by implanting phosphorus at high-energies with minimalhigh-temperature processing after implantation. Such deep N-type layersare referred to herein as “DN”, an acronym for deep N-type region.

Since substrate 2 has no epitaxial layer grown atop it, DN floorisolation regions 3A and 3B are not the same as buried layers formedusing high-temperature processing in conventional epitaxial processes,despite their similar appearance. The peak concentration and totalvertical dimension of a conventional buried layer is affected bysubstantial diffusion unavoidably occurring in high-temperaturefabrication before, during, and after epitaxial growth. The problem ofvariability in diffused and epitaxial processes occurs because slightchanges in temperature can cause large deviations in dopant profiles, aconsequence of the exponential dependence of diffusivity on temperature.

The implanted DN regions of the present invention, in contrast, areaffected only by the implant energy (or energies in the case of multipleimplants). The resulting profile is “as-implanted”, and not subject tothe variability associated with thermal processing. In a relative sense,DN region formation may preferably comprise the highest energyimplantation in the process, in the range of 1 MeV (onemillion-electron-volts) to over 3 MeV. Practically speaking, energies of1.5 MeV to 3.0 MeV allow deep implants to be achieved in reasonabletimes using singly- and doubly-ionized dopants. Triply-ionized dopantspecies having a high charge state can be implanted to a greater depth,but at correspondingly lower beam currents. The result is slower, morevariable implantations. Phosphorus implant doses for the DN region mayrange from 7E11 cm⁻² to 1E14 cm⁻² but typically comprise doses in the5E12 cm⁻² to 5E13 cm⁻² range.

Deep P-type region 7, having the acronym “DP”, may in a preferredembodiment be formed using the high-energy implantation of boron, at anydepth, but generally at a depth equal to or shallower than the DNregion. The implantation of boron to any given depth requires a lowerenergy than phosphorus, e.g. from 0.8 MeV to 1.5 MeV, since boron is asmaller less massive atom than phosphorus. Boron implant doses for theDP region may also range from 7E11 cm⁻² to 1E14 cm⁻² but may typicallycomprise doses in the 1E12 cm⁻² to 7E12 cm⁻² range.

The formation of the sidewall NI regions 5A through 5D is accomplishedusing medium- to high-energy ion implantation into the bottom oftrenches 4A through 4D before the trench is filled with any dielectricmaterial. These NI regions overlap onto the DN regions, completing thesidewall isolation in the region beneath the trenches and above the DNregions and allowing a shallower trench to be used to perform sidewallisolation. Shallower trenches are easier to manufacture, i.e. to etch,and to fill.

In device isolation structure 1, three isolated pockets, 6A, 6B, and 6D,are formed using two DN floor isolation regions 6A and 6B. Pocket 6C isisolated from pockets 6A, 6B, and 6D, but is electrically connected tosubstrate 2. While the DN floor isolation regions 3A and 3B could beelectrically floating or connected to the same potential as substrate 2,they are preferably biased to a potential more positive than thesubstrate 2, and therefore form reverse biased P-N junctions with thesubstrate and isolated pocket. The reverse bias present on each DNregion may be the same or different, and may be a fixed potential orvary with time. For example, pockets 6A and 6B, isolated from thesubstrate by floor isolation region 3A and trenches 4A and 4C; and fromone another by trench 4B, may contain 5V circuitry. Pocket 6D, isolatedfrom the substrate by floor isolation region 3B and trench 4D maycontain 12V circuitry, operating without regard to the 5V circuitrysharing the same P-type substrate 2.

Inside an isolation region, each isolated P-type pocket may containdevices biased at any potential equal to or more negative than the biaspotential of the DN floor isolation region underlying that pocket. Forexample if DN floor isolation region is biased at 5V, devices inside theisolated pocket may operate up to 5V and as negative as junctionbreakdowns of an isolated device may allow, potentially even morenegative than the potential of P-type substrate 2 itself. The isolatedpockets may likewise include additional P-type or N-type doped regionsintroduced before and/or after the isolation formation.

In Type-II isolation, each and every trench used to form sidewallisolation contains an implanted sidewall NI region at the bottom of thetrench. To form conventional STI among devices within individual P-typepockets and/or in the substrate, some of the trenches may be maskedduring implantation of the NI regions. For example, in FIG. 1A STItrenches 8A and 8B may be etched, filled, and planarized using the sameprocess steps as those used for the sidewall isolation trenches, thusminimizing process complexity.

Alternatively, shallower trenches may by etched using masking andetching steps separate from those used to form the sidewall isolationtrenches. These shallower trenches may be filled and planarized usingthe same process steps used to fill and planarize the sidewall isolationtrenches, thus reducing process complexity. Since the shallower trenchesare easier to each and refill, they have a smaller mask dimension thanthe sidewall isolation trenches, thereby improving transistor packingdensity of the process.

The combination of deeper sidewall isolation trenches and shallowertrenches is shown in cross section 10 of FIG. 1B, where deepdielectric-filled trenches 13A, 13B, and 13C, combined with sidewall NIregions 14A, 14B and 14C and DN floor isolation region 12 are used toisolate P-type pockets 15A and 15B from P-type substrate 11. Shallowdielectric-filled trenches 16A through 16E are included inside isolatedpockets 15A and/or in substrate 11 to facilitate partial isolation (asin conventional STI) among CMOS and other devices. Unlike the deeptrenches 13A through 13C, these shallow trenches 16A-16E do not containany implant at the trench bottom.

BCD Process with Epi-Less Isolation

FIGS. 2A and 2B illustrate modular process-architectures 30 and 40 forfabricating a variety of fully-isolated bipolar, CMOS and DMOS deviceswithout the need for high temperature processing, or epitaxy.

In principle, because no high temperatures are required to achieveelectrical isolation used the disclosed techniques, the formation of thesidewall NI regions, the dielectric filled trenches, and the DN floorisolation regions can be performed in any order without adverselyimpacting the electrical isolation of integrated devices. In practice,however, some fabrication sequences are preferred since they simplifywafer processing. Process details for forming the trench isolationstructures are detailed in the aforementioned application Ser. No.,11/298,075.

In this integrated process, devices are defined by a combination ofmasked implants comprising chain-implants or high-energy implants. Toachieve final dopant profiles that are substantially as-implanted, onlyminimal dopant redistribution from diffusions and high temperatureprocessing are possible. As-implanted dopant profiles differ fromstandard monotonically decreasing concentrations of diffused Gaussianprofiles because they can be optimized to set device characteristicsindependently.

In addition to offering greater flexibility in the sequence of formingthe isolation structures, the low-temperature process architecturedisclosed allows the sequence of device formation to be rearranged withminimal impact on device performance. For example the bipolar baseimplants may precede or follow the MOS gate formation steps. To maintainthe self-aligned MOS transistor characteristic, the LDD implants mustfollow gate formation but precede sidewall spacer formation while the N+and P+ source and drain implants must occur subsequent to sidewallformation.

In a preferred embodiment, the modular integrated process sequence 30 ofFIG. 2A involves the following steps:

-   -   Sidewall isolation and STI formation    -   Complementary well and deep implant formation    -   Complementary bipolar base formation    -   Dual gate formation        Following the steps shown in process flow 30, the modular        integrated process sequence 40 of FIG. 2B continues with the        following steps    -   DMOS body formation    -   Shallow drift and sidewall spacer formation    -   Source and drain implant formation    -   Polysilicon emitter formation    -   Contact formation    -   Multilayer interconnect formation    -   Bump metal redistribution layer formation    -   Passivation    -   Under bump metal and bump formation

A key feature of this process is its modularity, or ability to exerciseonly the processes required to implement a desired set of devices. Assuch, many of the processes listed above and shown in FIGS. 2A and 2Bare optional. Referring again to modular process-architecture 30 in FIG.2A, complementary well formation comprises a sequence of mask andimplants with no subsequent high temperature diffusion and minimaldopant segregation. For example a pre-implant oxide may be thermallygrown prior to implantation at a low temperature, e.g. 850° C. to 900°C., to a thickness of several hundred angstroms to minimize surfacecontamination. One pre-implant oxide may be used for several wellimplantations without the need to strip and re-grow the oxide. More thanone P-type and N-type well maybe formed in different regions tofacilitate fabrication of different voltage devices.

For example a 1^(st) P-type well is formed using a boron chain implantresulting in a non-monotonic or non-Gaussian doping concentrationprofile which may include at least a top portion PW1 and a buried ordeeper portion PW1B or any number of regions comprising implants ofvarying energy and dose. Deeper portion PW1B may comprise a heavier doseimplant and a higher concentration than the upper well portion PW1.

A 2^(nd) P-type well is formed also using a boron chain implantresulting in a non-monotonic or non-Gaussian doping concentrationprofile which may include at least a top portion PW2 and a buried ordeeper portion PW2B or any number of regions comprising implants ofvarying energy and dose. Deeper portion PW1B may also comprise a heavierdose implant and a higher concentration than the upper well portion PW1.The concentration and doping profile of the 1^(st) P-type well and the2^(nd) P-type well are dissimilar, and can be optimized for devices withdifferent operating voltage requirements. For example the 1^(st) P-typewell may be optimized for constructing 1.5V, 2.5V or 3.3V NMOStransistors, while the 2^(nd) P-type well may be optimized forfabricating 5V, 12V or 20V NMOS transistors.

In a similar fashion, a 1^(st) N-type well is formed using a phosphoruschain implant resulting in a non-monotonic or non-Gaussian dopingconcentration profile which may include at least a top portion NW1 and aburied or deeper portion NW1B or any number of regions comprisingimplants of varying energy and dose. Deeper portion NW1B may comprise aheavier dose implant and a higher concentration than the upper wellportion NW1.

Likewise, a 2^(nd) N-type well is also formed using a phosphorus chainimplant resulting in a non-monotonic or non-Gaussian dopingconcentration profile which may include at least a top portion NW2 and aburied or deeper portion NW2B or any number of regions comprisingimplants of varying energy and dose. Deeper portion NW1B may alsocomprise a heavier dose implant and a higher concentration than theupper well portion NW1. The concentration and doping profile of the1^(st) N-type well and the 2^(nd) N-type well are dissimilar, and can beoptimized for devices with different operating voltage requirements. Forexample the 1^(st) N-type well may be optimized for constructing 1.5V,2.5V or 3.3V PMOS transistors, while the 2^(nd) N-type well may beoptimized for fabricating 5V, 12V or 20V PMOS transistors.

In a preferred embodiment, the aforementioned P-type wells are implantedto a depth no deeper than the DN floor isolation layer, i.e. comprisinga chain implant with its highest implant energy less than the DN implantenergy. Accordingly, a P-type well sitting above a DN floor isolationregion should not substantially counter-dope the DN layer orsignificantly diminish the DN layer's isolation effectiveness.

Another deep implant option is the formation of a high voltage deepdrift region. Masked and implanted with energies up to or even exceedingthat of the deepest N-type well implants, the N-type drift region (ND)can be adjusted so its total implant dose QND is optimum forconstructing high-voltage transistors. The total implanted charge of ahigh voltage drift should be in the range of 1E12 cm⁻² to 5E12 cm⁻².

In one embodiment of this invention, shallow trench isolation is formedafter complementary well formation, following flow number 31 in FIG. 2A.In this sequence, the well doping profiles and junction depths areunaffected by the presence of the shallow trench isolation (STI)regions. It should be noted that the term shallow trench isolation is amisnomer, despite its common use in the art. Shallow trench isolation isanalogous to LOCOS field oxide in that it spaces MOS field effecttransistors from one another and prevents unwanted surface inversion andleakage between and among these transistors. So in the sense ofsuppressing surface transistor action, i.e. raising parasitic fieldthreshold voltages above the supply voltage so they never turn on, STIdoes provide a type of “isolation”. But the Type-II trench isolationdisclosed herein is capable of fully isolating a device, allowing it tofloat above the P-type substrate potential, whereas STI cannot do this.Specifically, STI is too shallow to connect to the deep implanted floorisolation region DN, and therefore does not form a floating pocket inthe way that Type-II isolation does.

In a preferred embodiment, the shallow trenches have a shallower depthand a narrower width than the deeper trenches forming the Type-IIisolation structures. In this manner, the shallow trenches may beinserted between devices with less adverse impact on die area andtransistor packing density. For example, in one embodiment the deeptrenches may be 1.6 microns deep and 0.4 microns wide, i.e., with a 4×aspect ratio, while the shallow trenches may be 0.2 to 0.5 microns deepand only 0.2 microns wide, with only a 1× to 2.5× aspect ratio. Loweraspect ratio trenches are easier to etch and refill than high aspectratio trenches, especially at high densities where loading effects canaffect plasma or reactive ion etch speed and uniformity. At the shallowend of the range, the STI depth is adequate to electrically separate N+and P+ implants from overlapping or touching, but is not deep enough tolimit the lateral extent of deeper bipolar base implants. In an NPNbipolar transistor, for example, STI can then be inserted between N+emitter and P+ base contact implants, but is inadequate to preventlateral overlap of the PB base implant onto the N+ collector implant,which may impact the base-to-collector breakdown rating of the device.Conversely, if the STI depth is chosen to be at the high end of thestated range and deeper than the base implant, it cannot be insertedbetween the N+ emitter and the P+ base contact since it would disconnectthe PB base from its P+ contact.

One key benefit of shallow trench isolation over LOCOS field oxideisolation is the lack of a bird's beak, a sloped oxide region thatinterferes with MOS transistor operation in complex and undesirableways, and ultimately limits transistor packing density. In LOCOS fieldoxide regions having widths less than 0.4 microns, encroachment of thebird's beak from both sides results in excessive bird's beak length,oxide thinning, compromised electrical performance, and high stress. Themore vertical profile of shallow trench isolation is better than LOCOSespecially at dimensions less than 0.3 microns.

In another embodiment of this invention, the shallow trench isolationmay be introduced prior to the well formation and integrated into thesidewall isolation process sequence. In one implementation, the shallowtrenches may be etched and filled using the same steps that are used toform the sidewall isolation trenches, with an additional mask to preventthe NI sidewall implant from entering the STI trenches. In anotherimplementation, separate masking and etching steps may be used toproduce the STI trenches and the sidewall isolation trenches, but theymay share some or all of the refill and planarization steps. Byintroducing the shallow trench isolation prior to well formation, theoxide present in the shallow trench may affect the well dopant profiles,reducing the silicon junction depth such that the buried or deepimplanted portion of the wells, e.g. NW1B and PW1B, are located closerto the silicon surface. In some instances these deep implanted portionsmay actually touch the silicon surface which could be beneficial if itraises the field threshold under the STI without degrading transistorbreakdown voltage. Conversely, if the deep implant portion of the wellsis too heavily concentrated, transistor breakdown could suffer andoff-state leakage current increase.

In still another embodiment of this invention, in flow 32, shown in FIG.2A, the shallow trench isolation regions are left out entirely and theirprocessing steps skipped.

After sidewall isolation, well formation and shallow trench isolation,complementary base regions may be formed following process flows 33 and34, shown in FIG. 2A. An implant is photolithographically defined andimplanted to form the PB base region of NPN bipolar transistors.Similarly, an implant is photolithographically defined and implanted toform the NB base region of PNP bipolar transistors.

The base implants may comprise single implants or chain implants-in oneembodiment, a deeper lighter portion and a shallower heavier portion.The shallow portion may be used to reduce base resistance while thedeeper portion establishes the current gain β and Early voltage V_(A) ofthe device. The bipolar transistors may be formed using eitherpolysilicon or implanted emitters. The base regions may be deeper forimplanted emitters than for polysilicon emitters.

After complementary base formation, single, dual, or triple gate oxidesare formed. In a dual gate oxide process, a first oxide is grown at alow temperature, e.g. 850° C. to 900° C., to a given thickness x_(ox1).The oxide is then masked and removed, generally by etching in HF acid,in regions where a thinner gate oxide is desired. Care must be takenduring the etching not to remove significant oxide from thedielectric-filled trenches, either by covering them during the etchprocess or by limiting the etch time. Alternatively, a capped trench, asdescribed in application Ser. No. 11/298,075, titled “IsolationStructures For Semiconductor Integrated Circuit Substrates And MethodsOf Forming The Same” by R. K. Williams and incorporated herein byreference, may be used to alleviate trench oxide erosion.

After the gate oxide is removed from select active regions, the entirewafer is then oxidized a second time to a second thickness x_(ox(thin))in regions where no oxide was present at the time of the secondoxidation. In regions where oxide remained prior to the second gateoxide, the oxide grows from its starting thickness x_(ox1) to a newthickness x_(ox(thick)) resulting from the two sequential oxidations.The thick oxide is generally thinner than the linear combination of thetwo oxide thicknesses, i.e. x_(ox(thick))<(x_(ox1)+x_(ox(thin))),particularly for thicker gate oxides, since oxidation slows-down from alinear growth rate to a more asymptotic parabolic growth rate as itgrows thicker. If, for example, the thick oxide is only slightly thickerthan the thin oxide, then a linear summation of oxide thicknesses is agood approximation. If the thick oxide in several times thicker than thethin oxide, the second oxidation may have little impact on the finalthickness.

In general, thicker oxides are used to support higher gate voltages. Forthicknesses above 100 Angstroms, the maximum steady-state gate voltageis limited to around 4 MV/cm, but extremely thin gates can supporthigher electric fields, e.g. at 6 to 8 MV/cm without rupture (in partbecause they “leak” due to quantum mechanical tunneling effects).Despite their lower maximum voltage ratings, thinner gate oxides aredesirable for achieving lower threshold voltage transistors and forsuppressing unwanted short channel effects in deep submicrontransistors. Examples may include a 150 Å gate for a 6V device, and a300 Å for a 12V device.

After single, dual, or triple gate oxide formation, gate polysilicon isthen deposited. The polysilicon layer may be in-situ doped (doped duringdeposition), or deposited un-doped and then doped P-type in some regionsand N-type in other regions. A refractory metal such platinum, titaniumor tungsten may then be deposited and optionally heated at a lowtemperature to react the metal and polysilicon, forming a low-resistancesilicide. The gate is then photolithographically masked and etched.

In an alternative process flow, the thicker gate is first grown, andcovered with an in-situ doped polysilicon layer which is subsequentlymasked and etched. Unwanted, thick gate oxide is then removed. The thingate oxide is then grown, covered with a second polysilicon layer, thisone being un-doped, and subsequently masked and doped to form bothP-type and N-type polysilicon regions. A refractory metal may then bedeposited on the second polysilicon layer and reacted to form silicide.The second polysilicon layer is masked and etched to form thelow-voltage gates. In this alternative process flow, the higher-voltage,thick-gate devices do not have a silicide, resulting in lower maximumswitching speed. One advantage of this process flow is it is possible toform a poly-to-poly capacitor between the first and the secondpolysilicon layers.

In an alternative process flow following paths 35 and 36, shown in FIG.2A, the base implants are introduced after the gate oxidation steps,having the advantage that the gate oxidation process has no impact onthe base dopant profiles. This is especially advantageous forpolysilicon emitter bipolar transistor formation where the base isnecessarily very shallow for high frequency operation. Another advantageof this flow is that the patterned polysilicon layers may be used todefine the emitter regions of the bipolar transistors, allowing betterdimensional control of the emitter regions.

After gate formation and base formation are completed, the processproceeds as illustrated in process flow chart 40 of FIG. 2B. Followingprocess flow 41, a dedicated DMOS body may be introduced through a maskusing a tilt implant. For fabricating an N-channel lateral DMOS, a boronimplant in the range of 1E13 cm⁻² to 9E13 cm⁻² is introduced at a 45degree angle, penetrating into the silicon beneath the MOS gate. Toprovide implant uniformity for MOS gates of various orientations, thewafers should be mechanically rotated during ion implantation.

An alternative flow 42 skips the P-body formation.

Shallow drift or Lightly-doped Drain (LDD) implants are masked andimplanted sequentially including for example more lightly doped 12V or20V drift regions, and more heavily doped 1.5V, 3V or 5V drift implants.After these shallow implants, a sidewall spacer oxide is formed usingtraditional methods, for example by depositing a thick oxide and etchingit back using an anisotropic etch.

Heavily-doped N+ and P+ implants are masked and implanted using, forexample an arsenic dose of about 5E15 cm⁻² and BF₂ dose of about 2E15cm⁻², respectively. An optional implant may also be introduced toimprove ESD performance. For example, a phosphorous dose of 1E15 cm⁻²may be used.

An Interlevel Dielectric (ILD) layer is formed by conventionalprocessing, such as deposition of one or more layers of oxide, siliconnitride, or other suitable dielectric materials. In the event thathigh-frequency polysilicon emitter bipolar transistors are desired, theprocess continues on flow 43, where polysilicon emitter windows areopened and polysilicon is deposited. The polysilicon may be dopedin-situ or deposited un-doped and then masked and ion implanted to formP-type and N-type polysilicon emitters. If such high-frequency bipolartransistors are not required, flow 44 can be used instead and thepolysilicon emitter steps skipped.

The wafers are annealed using a rapid-thermal-anneal-(RTA) process toactivate the implanted dopants. Aside from the gate oxidation processes,this step comprises the most significant portion of the thermal budgetin the process. This characteristic is unique in that most isolated ICprocesses have substantial high-temperature processing associated withisolation and well formation.

Multilayer interconnects are formed using a standard processingtechniques, including contact masking and etching, barrier metal,contact plug, or via deposition and etch-back, metal deposition, metalmasking and etching. The first metal layer may be covered with a secondILD layer, and the processes repeated to form additional levels of metalinterconnect. The metal thickness depends on the minimum line width tobe etched, but the lower levels may typically be in the range of 0.3-0.8microns, while the top level may typically be up to 3 microns thick, inorder to handle higher current densities.

One or more passivation layers such as oxide or silicon nitride are thendeposited, masked and etched to define bond pad openings.

An optional top metal layer may be used to redistribute the padlocations uniformly across the chip for bump assembly, typically in aregular grid array. This metal layer forms a redistribution layer (RDL).In this case, the passivation layers are etched in the bump locationsand an appropriate bump material is deposited, such as a three layersandwich of metal comprising titanium as an Ohmic contact layer,followed by nickel as a barrier, and finally silver as a solderablemetal. Silver solder bumps are then plated on the wafer and thefinalized wafer is ready for dicing.

Low-Voltage Devices

FIG. 3A illustrates a cross section 60 of two isolated CMOS devices,CMOS1 and CMOS2, fabricated in a common P-type substrate 61. CMOS1 isformed in a first isolation region that is isolated from substrate 61 bya floor isolation region 62A, dielectric-filled trenches 70 and NIregions 65. Within this isolation region, a first N-type well 66 is usedto form the body or well region containing a first PMOS 60A. N-type well66 is also used to contact floor isolation region 62A, either directlyby overlapping floor isolation region 62A, or indirectly by contactingand overlapping NI region 65. In a preferred embodiment, the dopingprofile of N-type well 66 is non-monotonic, comprising at least a topportion NW1 and a deeper portion NW1B, and N-type well 66 is formedusing a phosphorus chain implant of differing energies and doses. In theevent that the bottom of N-type well 66 does not overlap onto floorisolation region 62A, an intervening P-type region 64A will result.P-type region 64A is floating and has no substantial electrical effecton CMOS1.

A first P-type well 67 is used to form the body or well regionscontaining a first NMOS 60B. In a preferred embodiment, the dopingprofile of the P-type well 67 is non-monotonic, comprises at least a topportion PW1 and a deeper portion PW1B, and is formed using a boron chainimplant of differing energies and doses. Should P-type well 67 notoverlap onto floor isolation region 62A, an intervening P-type region64B will result. Since region 64B is also P-type it is electricallyshorted to the potential of P-type well 67. While N-type well 66 andP-type well 67 may touch, in a preferred embodiment, trench 70 separatesthem, thereby reducing the isolated CMOS device's susceptibility tolatch-up, a type of unwanted parasitic thyristor conduction.

Within N-type well 66, the PMOS 60A comprises a P+ source and drain 80,a sidewall spacer 85 , a lightly-doped drain (LDD) 94, a polysilicongate 72A with a silicide layer 71. The gate 72A is located atop a firstgate oxide layer 73, which has a thickness x_(ox1). Within P-type well67, the NMOS 60B comprises an N+ source and drain 81, a sidewall spacer87, an LDD 88, a polysilicon gate 72B with silicide layer 71. The gate72B is located atop first gate oxide layer 73, which has a thicknessx_(ox1), optimized for the best overall performance and voltagecapability for both PMOS 60A and NMOS 60B comprising CMOS1.

A second CMOS pair, CMOS2, is formed in a second isolation region thatis isolated from substrate 61 by a floor isolation region 62B, trenches70 and NI regions 65. Within this second isolation region, a secondN-type well 68 is used to form the body or well region of a second PMOS60C, which preferably has different a breakdown voltage or electricalconduction properties than the first PMOS 60A. The N-type well 68 isalso used to directly or indirectly contact floor isolation region 62B.In a preferred embodiment, the doping profile of the N-type well 68 isnon-monotonic, different from the doping profile of first N-type well66, comprising at least a top portion NW2 and a deeper portion NW2B, andis formed using a phosphorus chain implant of differing energies anddoses. In the event that the bottom of N-type well 68 does not overlaponto floor isolation region 62B, an intervening P-type region 64C willresult. P-type region 64C is floating and has no substantial electricaleffect on CMOS2.

A second P-type well 69 is used to fabricate a second NMOS 60D, whichpreferably have different characteristics than those fabricated in NMOS60B. In a preferred embodiment, the doping profile of the second P-typewell 69 is non-monotonic, different from the doping profile of firstP-type well 67, comprising at least a top portion PW1 and a deeperportion PW1B, and is formed using a boron chain implant of differingenergies and doses. Should P-type well 69 not overlap onto floorisolation region 62B, an intervening P-type region 64D will result.Since region 64D is also P-type, it is electrically shorted to thepotential of P-type well 69. While N-type well 68 and P-type well 69 maytouch, in a preferred embodiment, trench 70 separates them, therebyreducing their susceptibility to latch-up.

Within N-type well 68, PMOS 60C comprises a P+ source and drain 90, asidewall spacer 85, an LDD 86, and a polysilicon gate 72C with silicidelayer 71. Gate 72C is located atop a second gate oxide layer 74, whichhas a thickness x_(ox2) that is preferably different from the thicknessx_(ox1) of the first gate oxide layer 73. Within P-type well 69, NMOS60D comprises an N+ source and drain 91, a sidewall spacer 87, an LDD91, a polysilicon gate 72D with silicide layer 71. Silicided gate 72D islocated atop second gate oxide layer 74, which has a thickness x_(ox2),optimized for the best overall performance and voltage capability forboth PMOS 60C and NMOS 60D, comprising CMOS2.

In a preferred embodiment, CMOS2 comprises higher voltage devices thanCMOS1. In this case, the second gate oxide 74 is thicker than the firstoxide layer 73, and the second N-type well 68 and second P-type well 69have a lower surface concentration and greater depth than the firstN-type well 66 and first P-type well 67. The polysilicon material ingates 72A, 72B, 72C and 72D can comprise N-type doping for both PMOS 60Aand 60C and NMOS 60B and 60D, or alternatively the gate 72A in PMOS 60Aand optionally the gate 72C in PMOS 60C may comprise P-type dopedpolysilicon.

Any number of CMOS devices can be integrated by introducing trenches 70between and amongst them, either atop a shared floor isolation region,or in an isolated region with its own dedicated floor isolation regionelectrically biased to a potential different from the potential of otherfloor isolation regions. By including additional well implants and gateoxides, any number of fully isolated CMOS devices can be integrated andoptimized for operation at different voltages and device densities.

FIG. 3B illustrates low-voltage NPN bipolar transistors 100A and 100B,fabricated in a P-type substrate 101. Bipolar devices 100A and 100B canbe fabricated monolithically and simultaneously with the CMOStransistors 60A-60D shown in FIG. 3A, using the same substrate,isolation, wells implants, shallow implants and interconnection.

NPN 100A uses a dedicated PB base implant while NPN 100B utilizes one ofthe available CMOS P-type wells as its base. In NPN 100A, a DN floorisolation region 102A, an NI region 105A and a first N-type well 106Aelectrically form the collector, shorted to one another through the NIregion 105A. The intervening P-type region 104A may very small or maynot even exist if the bottom of the deep portion NW1B of N-type well106A overlaps onto DN floor isolation region 102A. In a preferredembodiment, first N-type well 106A contains a non-monotonic dopingprofile having a surface portion NW1 with a lighter concentration thanthe deeper portion NW1B. The lighter portion NW1 reduces depletionspreading into PB base 93 thereby increasing the Early voltage of NPN100A, while the deep portion NW1B, in combination with DN floorisolation region 102A, helps reduce collector resistance and reduces thecollector saturation voltage. In a preferred embodiment, the dopingprofile of the first N-type well 106A is formed using a phosphorus chainimplant of differing energies and doses.

Top-side collector contact is facilitated through an N+ region 91A;contact to the base 93 is achieved through a P+ region 92A; and N+region 91B serves as the emitter. Device isolation includesdielectric-filled trenches 92 with underlying NI regions 105Acircumscribing the entire NPN transistor 100A. Contact is achievedthrough a metal layer 95 and barrier metal layer 94 touching the P+region 92A and the N+ regions 91A and 91B through contact windows formedin an ILD layer 110.

In NPN transistor 100B, a DN floor isolation region 102B and an NIregion 105B electrically form the collector, contacted from the surfacethrough an N-type well 106B and an N+ region 91D. A P-type well 107forms the base of the transistor 100B. In a preferred embodiment, thedoping profile of P-type well 107 is non-monotonic, comprising at leasta top portion PW1 and a deeper portion PW1B, and is formed using a boronchain implant of differing energies and doses. The deeper portion PW1Bof first P-type well 107 may have a higher concentration than the topportion PW1. A P-type region 104B may be present beneath the P-type well107.

Top-side contact to the base (P-type well 107) is made through a shallowP+ region 92B. An N+ region 91C functions as the emitter of the NPNtransistor. Device isolation includes trenches 90 and NI regions 105Bcircumscribing the entire NPN transistor. Contact is formed by metallayer 95 and barrier metal layer 94 touching the P+ region 92B and theN+ regions 91C and 91D through contact windows formed in ILD layer 110.A deep implanted DP region 103 may be formed between DN floor isolationregions 102A and 102B to suppress leakage due to punch-through.

P-type well 107 may comprise the same doping profile PW1 and subsurfaceregion PW1B as the well optimized for some of the NMOS devices 60B and60D, described above. By relying on the same P-type well as NMOStransistors 60B and 60D, NPN 100B may be compromised in its performance,with tradeoffs adversely impacting current gain, breakdown voltage, andfrequency response. In contrast, the performance of NPN 100A, with itsown dedicated P-base implant, can be independently optimized withminimal compromises necessary.

FIG. 3C illustrates a cross-sectional view of low-voltage PNP bipolartransistors 130A and 130B, fabricated in a P-type substrate 131. Bipolartransistors 130A and 130B can be fabricated monolithically andsimultaneously with the CMOS transistors 60A-60D shown in FIG. 3A andthe NPN bipolar transistors 100A and 100B shown in FIG. 3B, using thesame substrate, isolation structures, well implants, shallow implantsand interconnections.

In FIG. 3C, PNP 130A uses a dedicated NB base implant while PNP 130Butilizes an N-type well as its base. In PNP 130A, a P-type well 136Aforms the collector. In a preferred embodiment, P-type well 136A has anon-monotonic doping profile comprising at least a top portion PW1 and adeeper portion PW1B and preferably formed using a boron chain implant ofdiffering energies and doses. A lighter top portion PW1 reducesdepletion spreading into NB base 139, thereby increasing the Earlyvoltage V_(A) of PNP 130A, while the deeper portion PW1B reducescollector resistance, thus lowering the collector voltage wheretransistor saturation occurs. Alternatively a P-type well having adoping profile different from the doping profile of P-type well 136A maybe substituted for P-type well 136A.

Electrical contact to the collector (P-type well 136A) is facilitatedthrough a P+ region 137A; contact to base 139 is achieved through ashallow N+ region 140A; and a P+ region 137D forms the emitter. Theisolation structure includes a floor isolation region 132A anddielectric-filled trenches 144 with underlying NI regions 135Acircumscribing the entire PNP 130A. Contact is achieved by a metal layer141 and a barrier metal layer 140 touching the P+ regions 137A and 137Dand N+ region 140A through contact windows formed in an ILD layer 134.

In PNP 130B, a DN floor isolation region 132B, NI region 135B andtrenches 144 electrically isolate the collector (P-type region 134B)from substrate 131. The collector contacts the surface through a P+region 137B and an optional P-type well 136B. An N-type well 138 formsthe base of PNP 130B. In a preferred embodiment, the doping profile ofthe N-type well 138 is non-monotonic comprising at least a top portionNW1 and a deeper portion NW1B and preferably formed using a phosphoruschain implant of differing energies and doses. P-type well 136B may alsobe formed with a non-monotonic doping profile as shown, comprising atleast a top portion PW1 and a deeper portion PW1B and preferably formedusing a boron chain implant of differing energies and doses. A portionof P-type region 134B may be present beneath N-type well 138, but may benegligibly thin, having minimal effect on device behavior.

Top-side contact to the base (N-type well 138) is achieved through ashallow N+ region 140B. A P+ region 137C forms the emitter. Theisolation structure includes floor isolation region 132B and trenches144 with underlying NI regions 135B circumscribing PNP 130B. Contact isachieved by metal layer 141 and barrier metal layer 140 touching the P+regions 137B and 137C and N+ region 140B through contact windows formedin ILD layer 134. A deep implanted DP region 133 may be present betweenDN floor isolation regions 132A and 132B to suppress leakage due topunch-through.

PNP 130B utilizes first N-type well 138, which may comprise the samedoping profile NW1 and subsurface region NW1B as the N-type welloptimized for integrating submicron PMOS 60A or 60C. As a result thevertical dopant profile of the first N-type well 138 would besubstantially similar to the vertical dopant profile of well 66 or 68 inPMOS 60A or 60C, respectively. By relying on the same N-type well asPMOS 60A or 60C, the performance of PNP 130B may be compromised. Bycontrast, PNP 130A, which includes its own dedicated N-type base implant139, can be independently optimized without compromising the performanceof other integrated devices.

The collector of PNP 130B comprises wells 136B which may be formed inthe same process step as the P-type well optimized for integrating NMOS60B or 60D, in which case each of wells 136B would have a verticaldopant profile substantially similar to the vertical dopant profile of67 or 69 of NMOS 60B or 60D, respectively.

The modular process described is therefore capable of integrating a widevariety of fully-isolated low-voltage CMOS and complementary bipolar(i.e. both NPN and PNP) transistors with minimal high-temperatureprocessing. Layers such as first and second N-type wells in PMOS 60A and60C, respectively, and the first and second P-type wells in MMOS 60B and60D, respectively, are reused for maximum flexibility but in a preferredembodiment are optimized for CMOS performance and reliability, whilebipolar devices are generally not optimized unless a dedicated baseimplant is included.

High-Voltage Devices

FIGS. 4A-4C illustrate several non-isolated and isolated high-voltageN-channel transistors which may be constructed in the disclosed modularBCD process. These devices are formed using a deep implanted N-typedrift region ND to relax surface electric fields and enhance deviceavalanche breakdown voltage capability. The deeper ND layer, unlike theshallow post-polysilicon LDD region used to form 12V drift regions, isnot self-aligned to the gate. The deeper junction, when optimized,offers the capability of a lower surface electric field and reduced hotcarrier effects than shallow self-aligned drift regions.

FIG. 4A shows a cross-sectional view of a non-isolated N-channel lateralDMOS 160 fabricated in accordance with the disclosed modular process andwith minimal high temperature processing. The device comprises an N+drain region 167A with an N-type drift region 166 of length LDI, asilicided gate 177 sitting atop a gate oxide layer 175, and an N+ sourcecontact 167B and P+ body contact 169A. A P-type well 164A extends undergate 177 and forms the LDMOS body. P-type well 164A may comprise anon-monotonic doping profile including at least a top portion PW1 and adeeper portion PW1B or any number of regions comprising implants ofvarying energy and dose. Deeper portion PW1B may comprise a heavier doseimplant and a higher concentration than the upper portion PW1, reducingsurface electric fields and impact ionization near the surface. A deepimplanted DP region 162A may be included to enhance device ruggedness bymoving the highest electric field even farther away from the siliconsurface. In a preferred embodiment, N-type drift region 166 is spacedapart from P-type well 164A. By locating P-type well 164A under only aportion of the channel beneath gate 177, the device has two channelconcentrations: the heavier concentration of P-type well 164A sets thedevice threshold and prevents punch-through, while the lighter substrateportion dominates the device breakdown and impact ionizationcharacteristics.

A sidewall spacer 176 and lightly-doped source extension 168 areartifacts of CMOS fabrication and are not beneficially required forproper operation of the DMOS 160. Device fabrication without integratedCMOS could eliminate these features altogether. Because, however, thesource extension 168 is relatively highly doped compared to deep driftND 166, the effect of source extension 168 on the operation of DMOS 160is negligible.

In a preferred embodiment, N+ drain 167A may be at the center of theDMOS device, circumscribed by gate 177, P-type well 164A, and source167B. This drain-centric device may also be surrounded by adielectric-filled trench 171 with an underlying NI sidewall region 170and a deep N-type region 163 forming an enclosing ring electricallybiased to a positive potential above substrate 161 through an N-typewell 165 and an N+ region 167C. N-type regions 167C, 165, 170, and 163may advantageously collect any electrons injected into the substrate inthe event that drain 167A becomes forward-biased relative to P-typesubstrate 161, thus preventing these electrons from interfering withother devices integrated in substrate 161.

Deep P-type region 162A and P-type well 164A suppress unwanted parasiticbipolar conduction in P-type substrate 161 by increasing minoritycarrier (electron) recombination. Substrate hole-current resulting fromelectrons recombining in region 162A may flow through P-type well 164Aand through an optional outer ground ring comprising a P+ region 169B, aP-type well 164B, and a DP layer 162B. Despite its lack of isolation,non-isolated lateral DMOS 160 suppresses bipolar conduction in threeways, through recombination of minority carriers in DP region 162A,through collection of minority carriers in deep N-type region 163, andthrough low-impedance “grounding” by P+ substrate contacts 169A and169B.

FIG. 4B illustrates a fully-isolated N-channel lateral DMOS 200fabricated in a P-type substrate 201A and an isolated P-type pocket 201Bwith an N+ drain region 209A, an N-type drift region 208 of length LDI,a gate 216, a gate oxide layer 214, an N+ source region 209B, and a P+region 210A contacting a P-type well 206, which comprises the bodyregion of DMOS 200. P-type well 206 may include at least a top portionPW1 and a deeper portion PW1B or any number of regions comprisingimplants of varying energy and dose. Deeper portion PW1B may comprise aheavier dose implant and a higher concentration than the upper portionPW1.

A sidewall spacer 215 and a lightly-doped source extension 218 areartifacts of CMOS fabrication and are not beneficially required forproper operation of the DMOS 200. Because of its relatively high dopingconcentration, the effect of source extension 218 on the operation ofhigh-voltage DMOS device 200 is negligible.

P-type region 201B and the DMOS 200 fabricated within it are isolatedfrom substrate 201A by an isolation structure formed by a high-energyimplanted floor isolation region 202, a dielectric-filled trench 205,and an NI region 204, without the need for high-temperature diffusionsor epitaxy. Floor isolation region 202 is electrically contacted throughan N+ implant 209C, an N-type well 207, and NI region 204, to an ISOelectrode formed by a metal layer 212 and an optional barrier metallayer 213 extending through an ILD layer 211. Trench 205 may be locatedon the inner edge of N-type well 207, as shown, or N-type well 207 maybe surrounded on both its inner and outer edges by trench isolation. AP+ substrate connection region 210B with an underlying DP layer 203 andoptional P-type well (not shown) may also surround DMOS 200.

The potential of floor isolation region 202 is set by the ISO electrodeand may be the same as the potential of the drain region 209A, theP-type well 206, the substrate 201A, or some other fixed or changingpotential. The maximum allowable voltage differential between floorisolation region 202 and N-type drift region 208 is limited bypunch-through of the intervening P-type region 201B, while the maximumvoltage differential between floor isolation region 202 and P-type well206 is set by the avalanche breakdown voltage between these two regions.If floor isolation region 202 is connected to the same potential asdrain region 209A, this punch-through breakdown may be avoided. However,if the floor isolation region 202 is connected to the same potential assubstrate 201A, then P-type well 206 may be biased to a potential morenegative than substrate 201A.

FIG. 4C shows a cross-sectional view of an LDMOS 230, in which theP-type body, rather than the drain, is located at the center of thedevice, and the gate and drain surround the body. A P+ region 238A, aP-type well 237, and an N+ source region 239A are surrounded by a gate243 and a gate oxide layer 241, which is further surrounded by an N-typedrift region 236A of length L_(D1) and an N+ drain region 239B. P-typewell 237 may include at least a top portion PW1 and a deeper portionPW1B or any number of regions comprising implants of varying energy anddose. Deeper portion PW1B may comprise a heavier dose implant and ahigher concentration than the upper portion PW1.

An active portion 230A of LDMOS 230 is fabricated within a P-type pocket231B, which is isolated from substrate 231A by a dielectric-filledtrench 235, a floor isolation region 232, and an NI region 234. A driftregion 236A overlaps onto NI layer 234 thereby biasing floor isolationregion 232 to the same potential as drain region 239B. Alternatively, anoptional N-type well (not shown) can be included to connect drain region239B to floor isolation region 232.

For enhanced device ruggedness, an N+ source connection region 239A anda P+ body connection region 238A may be electrically shorted by metal bya metal layer 244, and an optional barrier metal layer 245, extendingthrough openings in an ILD layer 240.

A sidewall spacer 242 and a lightly-doped source extension 246 areartifacts of CMOS fabrication and are not beneficially required forproper operation of the LDMOS 230. Because of its relatively high dopingconcentration, the effect of source extension 246 on LDMOS 230 isnegligible.

In the preferred embodiment shown in FIG. 4C, an inactive region 230Bcontains an N-type edge termination region 236B and an N+ region 239C,biased at the same potential as drain region 239B, which surround theouter periphery of the isolated DMOS 230, thereby extending its blockingvoltage relative to substrate 231A. The entirety of LDMOS 230 may alsobe surrounded by a P+ ground contact region 238B and/or a deep implantedP-type region DP 233. In an alternate embodiment, the outer edge of thedevice may end with trench 235.

FIG. 5 illustrates a cross-sectional view of a P-channel fully isolatedlateral DMOS 260. Fabricated in a P-type substrate 261A and an isolatedP-type pocket 261B, DMOS 260 comprises a central P+ drain region 269A,an optional implanted deep drift PD 268 of length L_(D1), a gate 278, agate oxide layer 276, a P+ source region 269B, an N+ implant 270Acontacting an N-type well 267 comprising the body region. The N-typewell 267 may include a top portion NW1 and a buried or deeper portionNW1B or any number of regions comprising implants of varying energy anddose. Deeper portion NW1B may comprise a heavier dose implant and ahigher concentration than the upper portion NW1.

Alternatively, an N-type well comprising a chain implant with at least atop portion NW2 and a deeper portion NW2B or any number of regionscomprising implants of varying energy and dose may be used in place ofthe N-type well 267. Deeper portion NW2B may comprise a heavier doseimplant and a higher concentration than the upper portion NW2 yet deeperportion NW2B may be lighter in doping than the deeper portion NW1B ofN-type well 267.

Alternatively, deep drift PD 268, implanted before gate formation, canbe replaced by a shallow P-type drift region, implanted later in theprocess, such as the LDD 86 used in the CMOS2 shown in FIG. 3A. If theimplant occurs after polysilicon gate formation, the shallow driftregion will be self aligned to the gate, further reducing the risk ofoverlap of the drift region and the N-type well 267 acting as the bodyregion of LDMOS 260. In another embodiment, deep drift PD 268 does notextend under gate 278 but stops some distance from the edge of gate 278,with a portion of P-type pocket 261B present between deep drift PD 268and gate 278. The more lightly doped material in P-type pocket 261B cancarry the on-state current in LDMOS 260 in the absence of PD region 268,albeit at a higher resistance.

A sidewall spacer 275 and a lightly-doped source extension 271 areartifacts of CMOS fabrication and are not beneficially required forproper operation of the LDMOS 260. Because of its relatively high dopingconcentration, the effect of source extension 271 on the operation ofhigh-voltage LDMOS 260 is negligible.

P-type pocket 261B and LDMOS 260 fabricated within it are isolated fromsubstrate 261A by an isolation structure that comprises a high-energyimplanted DN floor-isolation region 262; a dielectric-filled trench 265;and an NI implant 264 connecting the trench 265 and floor isolationregion 262, without the need for high-temperature diffusions or epitaxy.DN floor isolation region 262 is electrically contacted through N+implant 270A, N-type well 267, and NI region 264. Electrical contact tothe device is made via contact windows etched in an ILD layer 272, withmetal layer 274, and optional barrier metal layer 273.

As shown, trench 265, located on the outer edge of N-type well 267, maybe surrounded by an additional ND high voltage termination region 266 oflength L_(D3), contacted by an N+ region 270B and preferably shorted toN-type well 267. A P+ substrate contact region 269C with an optionalunderlying DP layer 263 and/or an optional P-type well (not shown) mayalso surround LDMOS 260.

DN floor isolation region 262 and the body region, i.e. N-type well 267,are preferably tied to the high-voltage positive supply rail V_(DD) bythe “B/ISO” electrode and are often also connected to source connection“S”. The source S and body B/ISO pins may remain separated if, forexample, a current sensing source resistor is needed.

Integrated Diodes in Type-II Isolated BCD Process

In many power applications an isolated high-voltage diode is requiredfor application as a rectifier or for re-circulating inductor currentduring the break-before-make interval in switching converters. FIG. 6Aillustrates one such isolated diode 300 comprising a DN cathode 302 anda segmented anode comprising P+ regions 309A and 309B enclosed within aP-type well 305. In one embodiment of this invention, the doping profileof P-type well 305 is non-monotonic comprising at least a top portionPW1 and a deeper portion PW1B and formed using a boron chain implant ofdiffering energies and doses.

Diode 300 is isolated from substrate 301A by DN layer 302, an N-typewell 307 and an NI region 304. An internal drift region ND 306A oflength L_(D1) connected to N-type well 307 is used to improve avalanchebreakdown of the isolated diode 300. Electrical contact to diode 300 isperformed through contact windows etched in an ILD layer 315, with ametal layer 313, and optional barrier metal layer 312.

The combination of DN layer 302, NI layer 304, N-type well 307, andisolated DN drift region 306A are biased by an electrode “K/ISO” to apotential equal to or above substrate 301A. P+ regions 309A and 309B(the anode) along with parasitic N+ emitter regions. 308A and 308B areshorted together and to anode connection “A” which may be forward-biasedrelative to the cathode or reverse-biased up to the breakdown voltage ofP-type well 305 to DN floor isolation region 302. By essentially forminga saturated parasitic NPN bipolar, N+ regions 308A and 308B help reducethe amount of unwanted hole-current leaking into substrate 301A.

As shown, a dielectric-filled trench 310 located on the outer edge ofN-type well 307 may comprise the outer edge of the device, or mayotherwise be surrounded by an additional high voltage termination region306B of length L_(D3), contacted by an N+ region 308C and electricallyshorted to well 307 via metal layer 313. A P+ substrate connection 309Cwith an optional underlying DP layer 303 and/or an optional P-type well(not shown) may surround the device.

Another isolated diode 330 is illustrated in FIG. 6B, comprising a DNcathode region 332 and a segmented anode comprising P+ regions 339A and339B enclosed within P-type wells 336A and 336B. In one embodiment, thedoping profile of the P-type wells 336A and 336B is non-monotonic,comprising at least a top portion PW1 and a deeper portion PW1B andpreferably formed using a boron chain implant of differing energies anddoses.

DN layer 332, N-type wells 337A and 337B, N+ regions 340A and 340B, NIregions 334A, 334B, 334C and 334D and dielectric-filled trenches 335A,335B, 335C, and 335D form the cathode and isolation structure of thediode 330, surrounding and separating multiple P-type anode regions 339Aand 339B and wells 336A and 336B from substrate 331A. The number ofanode regions shown in FIG. 6B represents a simplified device forexemplary purposes - many more anode regions could be included to scalethe device for higher currents. Electrical contact to the device isperformed through contact windows etched in an ILD layer 341, with ametal layer 342, and optional barrier metal layer 343.

In the event that P-type wells 336A and 336B and N-type wells 337A and337B are not sufficiently deep to overlap onto DN cathode region 332,isolated P-type pockets 331B, 331C, 331D and 331E may result, but withminimal impact on the performance of diode 330. Specifically P-typepockets 331B and 331C are electrically shorted to P-type wells 336A and336B respectively, while pockets 331C and 331E are floating, surroundedby N-type material on all sides, i.e. N-type wells 337A and 337B above,NI regions 334A and 334B or 334C and 334D on the sides, and DN cathoderegion 332 from below.

The internal breakdown voltage of isolated diode 330 is determined bythe avalanche breakdown voltage of P-type wells 336A and 336B relativeto NI regions 334 and to DN cathode region 332. The external breakdownof DN cathode region 332 to the surrounding substrate 331A, and to theground ring comprising P+ region 339C and optional DP layer 333 isdetermined by the outer edge termination of the diode 330. Illustrativeof one such termination, exterior ND drift region 338 of length L_(D3)is used to enhance device breakdown by reducing surface electric fields.

JFETs in Type-II Isolated BCD Process

Unlike conventional enhancement-mode MOSFETs which are “normally-off”devices, JFETs conduct drain current even with their gates biased totheir source potential, i.e. they conduct at V_(GS)=0. Such devices areconvenient in forming current sources for start-up circuitry when othertransistors are not yet operational.

FIG. 7A illustrates a high-voltage isolated P-channel JFET 350 includinga P+ drain region 359A, a P-type channel region 351B, a top gatecomprising an N-type well 356A and an N+ region 360A, a bottom gatecomprising a DN floor isolation region 352, and a source comprising aP-type well 357 and a P+ region 359C. In a one embodiment, the dopingprofile of N-type well 356A is non-monotonic comprising at least a topportion NW1 and a deeper portion NW1B and preferably formed using aphosphorus chain implant of differing energies and doses.

JFET 350 is isolated from a substrate 351A by DN floor isolation region352, an NI region 354 and an enclosing dielectric-filled trench 355. Thebottom gate, DN floor isolation region 352, is electrically biased atthe “ISO” potential through an N-type well 356B and an N+ region 360B.The bottom gate bias may vary in potential in proportion with top gate“G” or be biased at a fixed potential.

While the outer edge of the isolated JFET 350 may be defined by trench355, the device may also be surrounded by a high-voltage terminationcomprising N-type well 356B, N+ region 360B, and/or lightly-doped NDregion 358B of length L_(D2). This outer termination determines themaximum potential JFET 350 can be biased above surrounding P-typesubstrate 351A. The internal breakdown of isolated JFET 350 isdetermined primarily by the length L_(D1) of lightly-doped region 358Aand the breakdown voltage of the P-I-N junction comprising P+ region359A, P region 351B and DN floor isolation region 352. The entire diode350 may be terminated by a P+ substrate ring 359B with an optionalunderlying DP region 353 and/or a P-type well (not shown). Electricalcontact to the device is performed through contact windows etched in anILD layer 361, with a metal layer 362, and an optional barrier metallayer 363.

FIG. 7B illustrates another isolated P-channel JFET 370, including a P+drain region 377A with a surrounding P-type well 376A, a P-type channelregion 371B, a top gate comprising an N-type well 375A and an N+ region378A, a bottom gate comprising a DN floor isolation region 372, and asource comprising a P-type well 376B and a P+ region 377B. In oneembodiment, the doping profile of the N-type well 375A is non-monotoniccomprising at least a top portion NW1 and a deeper portion NW1B andpreferably formed using a phosphorus chain implant of differing energiesand doses.

JFET 370 is isolated from a substrate 371A by a DN floor isolationregion 372, an NI region 374 and an enclosing dielectric-filled trench385. Bottom gate, DN floor isolation region 372, is electrically biasedat the “ISO” potential through an N-type well 375B and an N+ region378B. The bottom gate bias may vary in potential in proportion with topgate “G” or be biased at a fixed potential.

While the outer edge of the isolated JFET 370 may be defined by trench385, the device may also be surrounded by a high-voltage terminationcomprising an N-type well 375B, an N+ region 378B, and a lightly dopedND region 379 of length L_(D3). This outer termination determines themaximum potential JFET 370 can be biased above surrounding P-typesubstrate 371A. The internal breakdown of isolated JFET 370 is ideallydetermined by the avalanche voltage of the junction comprising P+ region377A, P-type well 376A, P region 371B and DN floor isolation region 372.The entire diode 370 may be terminated by a P+ substrate ring 377C withan optional underlying DP region 373 and/or a P-type well (not shown).Electrical contact to the device is performed through contact windowsetched in an ILD layer 379, with a metal layer 380, and an optionalbarrier metal layer 381.

Polysilicon Emitter Bipolar Transistors in Type-II Isolated BCD Process

Bipolar transistors with diffused emitters are limited in their maximumfrequency by carrier transport across both the base and emitter regions.A prior art method to improve the high-frequency capability of suchdevices is to replace the diffused emitter with polysilicon in directcontact with the base region (see, e.g., Michael Reisch, High-frequencyBipolar Transistors, Springer, 2003). By adjusting the base depth forthe ultra-shallow polysilicon emitter, frequencies in the tens ofgigahertz can be achieved.

Such polysilicon emitter bipolar transistors can be adapted to fit intothe modular low-temperature as-implanted BCD process as disclosed with aminimal number of additional process steps, benefiting from the enhancedisolation capability, the non-monotonic well doping profiles, thesharing of common implants for wells, floor isolation regions, sidewallisolation region, and base contact implants with other devices in theBCD arsenal, and the capability to isolate and “float” any singlebipolar device or group of bipolar and CMOS devices at a high voltageabove the surrounding substrate potential without changing themanufacturing process.

Unlike many conventional BiCMOS and BCD processes which integrate onlyhigh speed NPN transistors, the disclosed modular process has thecapability to integrate high-frequency, complementary (i.e. NPN and PNP)bipolar devices. Moreover, in a preferred embodiment, the dopingprofiles of such bipolar transistors are customized to enhance the“analog” performance of the devices, rather than increasing digitalswitching speed. Analog optimized characteristics include achieving arelatively constant current gain β over a wide range of collectorcurrents, a high Early voltage V_(A), a large transconductance g_(m),and a high gain-bandwidth product.

FIG. 8 illustrates an NPN polysilicon emitter bipolar transistor 400Band a PNP polysilicon emitter bipolar transistor 400A. NPN 400B includesan N-type polysilicon-emitter 415 and a P-type base PB 411 formed in anN-type well 407B and isolated from a common P-type substrate 401 by anisolation structure comprising dielectric-filled trenches 405C and 405D;NI regions 404C and 404D, and an implanted DN floor isolation region402B. DN floor isolation region 402B is electrically connected to theN-type well 407B through overlapping NI regions 404C and 404D. The areaof polysilicon-emitter 415 contacting the surface of substrate 401 isdetermined by a polysilicon emitter mask.

In a preferred embodiment, N-type well 407B contains a non-monotonicdoping profile having a surface portion NW1 with a lighter dopingconcentration than the deeper buried NW1B portion. The lighter dopingconcentration of surface portion NW1 reduces depletion spreading in PBbase 411, thereby increasing the Early voltage V_(A), while the deeperportion NW1B, in combination with DN floor isolation region 402B helpsto reduce collector resistance and improves transistor saturation. In apreferred embodiment, the doping profile of the N-type well 407B isformed using a phosphorus chain implant of differing energies and doses.A P-type floating layer 403B shown between N-type well 407B and DN floorisolation region 402B may be very small or may not even exist if thebottom of N-type well 407B overlaps onto DN floor isolation region 402B.

Top-side collector contact is facilitated through an N+ region 408C;contact to the base is achieved through a P+ region 409B; and N-typepolysilicon-emitter 415 forms the emitter. The isolation structureincludes dielectric-filled trenches 405C and 405D with underlying NIisolation regions 404C and 404D circumscribing the entire NPN 400B.Contact with NPN 400B is achieved by a metal layer 417 and an optionalbarrier metal layer 416 extending through contact windows formed in anILD layer 420.

PNP 400A includes a P-type polysilicon-emitter 412 and an NB baseimplant 410 formed within a P-type well 406. Top-side collector contactis facilitated through a P+ region 409A; contact to the base is achievedvia an N+ region 408A. Contact is achieved by a metal layer 414 andoptional barrier metal layer 413 extending through contact windowsformed in an ILD layer 420.

A DN floor isolation region 402A, NI regions 404A and 404B, anddielectric-filled trenches 405A and 405B isolate a P-type pocket 403Aand a P-type well 406 from substrate 401. DN floor isolation region 402Ais biased through an N-type isolation contact well 407A and an N+ region408B.

In a preferred embodiment, P-type well 406 has a non-monotonic dopingprofile comprising at least a top portion PW1 and a deeper portion PW1Band preferably formed using a boron chain implant of differing energiesand doses. The P-type pocket 403A may very thin and may not even existif the bottom of P-type well 406 overlaps onto DN floor isolation region402A. The lighter doping of the top portion PW1 reduces depletionspreading in NB base 410, thereby increasing the Early voltage V_(A)while the deeper portion PW1B reduces collector resistance and improvestransistor saturation.

Bipolar devices NPN 400A and PNP 400B can be fabricated monolithicallyand simultaneously with the CMOS transistors 60A-60D shown in FIG. 3A,using the same substrate, isolation, wells implants, shallow implantsand interconnection.

Type-II Isolated BCD Process Design Considerations

The voltage capability of isolated devices in Type-II trench isolationis determined by the relative junction depths of the implanted regions.Unlike other trench isolation schemes, the maximum breakdown voltage ofan isolated device is not determined by the trench depth but by thedepth and implant energy of the deep implanted DN floor isolationregion.

As illustrated in FIG. 9A, the voltage capability of Type-II isolationtypically exceeds other trench isolation schemes, because the NIisolation region 433 implanted into the bottom of trench 434 before itis filled, bridges the gap between the top of DN floor isolation region432 and the bottom of trench 434, eliminating the requirement for deeptrench etching and filling.

An isolated device's maximum voltage capability is limited by theone-dimensional avalanche breakdown of the junction formed by P+ region435, P-type pocket 431B, and DN floor isolation region 432. Depending onthe doping concentration of P-type pocket 431B, the mechanism ofavalanche breakdown may be P-N junction avalanche or P-I-N reach-throughbreakdown. If the doping of isolated P-type pocket 431B is sufficientlyconcentrated, the depletion region of the P-N junction formed between DNfloor isolation region 432 and P-type pocket 431B under electricalreverse-bias will avalanche before the depletion region ever reaches P+region 435. This can be mathematically expressed as x_(D)(BV)<x_(net),where x_(D)(BV) is the width of depletion spreading in P-type pocket431B at the onset of avalanche breakdown at a voltage BV and x_(net) isthe “net thickness” between P+ region 435 and DN floor isolation region432. In such instances, the breakdown voltage is determined primarily bythe doping concentration of DN floor isolation region 432 and the dopingconcentration of the isolated P-type pocket 431B, which is equivalent tothe doping concentration of substrate 431A.

Alternatively, if P-type pocket 431B is doped lightly, the depletionregion “reaches through” P-type region 431B, i.e. x_(D)(BV)>x_(net).Fully depleted, the lightly-doped P-type pocket 431B behaves similar toan in intrinsic region in a P-I-N diode. As a result, the breakdownvoltage is linearly proportional to the thickness x_(net) of lightlydoped region 431B. This can be mathematically approximated asBV≈E_(crit)·x_(net)+BV₀, where E_(crit) is the critical avalancheelectric field of silicon, ranging from 20 to 35 V/μm depending onconcentration, and BV₀ is a linear fitting parameter approximating thebreakdown of the P-N junction when is the intrinsic layer has zerothickness, i.e. x_(net)=0.

In the disclosed low-temperature process, the as-implanted dopingprofile accurately sets the maximum breakdown, avoiding the variabilitycoming from high-temperature diffusion. For a fixed phosphorus dose, theDN implant's depth and hence the breakdown voltage BV is linearlyproportional to implant energy. For an implant of 2 to 2.5 MeV,breakdown voltages range from 20 to 35 volts, corresponding toapproximately a 1 micron net thickness of P-type pocket 431B. While thisbehavior linearly scales to thicker layers and higher voltages, themaximum energy of commercially available ion implanters today limitsthis breakdown voltage to tens of volts.

As shown in FIG. 9B, the combined depth of dielectric-filled trench 444and trench bottom NI region 443 must great enough that NI implant 443overlaps onto DN floor isolation region 442 to complete the isolation ofP-type pocket 441B from substrate 441A. Given these factors, the depthof N-type well 445 is bounded by several considerations. If N-type well445 is implanted too shallow, it will not overlap NI region 443, i.e.Δx₁>0, and DN floor isolation region is undesirably left electricallyfloating, subject to unwanted parasitic and transient phenomena. IfΔx₁>0, then necessarily Δx₂>0, floating P-type pocket 441B separatesN-type well 445 from DN floor isolation region 442, and the resistanceof N-type well 445 is not reduced by the presence of DN floor isolationregion 442. Without overlapping the highly-doped DN floor isolationregion 442, achieving low resistivity in N-type well 445 depends solelyon the non-monotonic doping profile of N-type well 445, where N-typewell 445 comprises a chain-implanted well with a lower portion NW1B,higher in concentration than an upper portion NW1. Achieving a low wellresistivity is beneficial to prevent parasitic CMOS latch-up, anunwanted and potentially damaging thyristor effect, but threshold- andbreakdown-voltage considerations limit the maximum surface concentrationof the N-type well 445.

In FIG. 9C, an N-type well 455 is implanted to a greater depth thanN-type well 445, such that the bottom portion of well 455 extendsvertically to a depth below dielectric-filled trench 454 and overlapsonto NI region 453, i.e. using the previous definition, Δx₁<0. Whilethis doping profile is preferred over that of the structure in FIG. 9B,floating P-type pocket 451B separates N-type well 455 from the top of DNfloor isolation region 452, i.e. Δx₂>0, so that the presence of thefloor isolation region 452 does not reduce the resistivity of N-typewell 455.

FIG. 9D illustrates a further improvement, where the bottom of an N-typewell 465 is implanted deeper than dielectric-filled trench 464 andsubstantially overlaps NI region 463. Provided that the thickness ofintervening P-type pocket 461B is very small, i.e. in the limit asΔx₂→0, then N-type well 465 “punches through” to DN floor isolationregion 462 with very little voltage, and the resistivity of N-type well465 is beneficially reduced.

In a preferred embodiment of this invention, illustrated in FIG. 9E, anN-type well 475 overlaps onto both DN floor isolation region 472 and NIregion 473, and has a lighter-doped top portion NW1 extending along theentire vertical dimension (depth) of dielectric-filled trench 474, fromthe surface of substrate 481A to a deeper portion NW1B of N-type well475. The combination of the deeper portion NW1B of well 475 overlappingDN floor isolation region 470 reduces the resistivity of N-type well 475substantially, improving latch-up and snap-back breakdown withoutadversely impacting threshold or lowering the voltage capability of CMOSdevices (not shown) formed within N-type well 475.

FIG. 9F illustrates an isolation arrangement similar to that shown inFIG. 9E, but where the shallowest implants of N-type well 485, i.e., theimplant or implants forming the top portion NW1 of N-type well 485 aretoo deep to prevent the unwanted formation of a P-type layer 481C of adepth Δx₃ atop portion NW1. To avoid this problem, either the implantenergy of the shallowest phosphorus implant into N-type well 485 can bereduced, or an additional lower energy implant can be added to thewell's chain of implants.

In conclusion, Type-II trench isolation avoids the need for deep trenchsidewall isolation by introducing an intervening NI layer overlappingand bridging the gap between the bottom of a trench and the top of thehigh-energy implanted DN floor isolation region, enabling the use ofdeeper, higher energy floor isolation. The deeper floor isolation placesadditional design considerations on the formation of any isolated N-typewell. The N-type well preferably should include a deep portionoverlapping or nearly overlapping the DN floor isolation region to avoidthe formation of an unwanted floating P-type region, or the floatingP-type region should be kept as thin (vertically) as possible so thatthe DN floor isolation region and the N-type well “punch-through” toeach other and behave electrically similar to overlapping implantedregions.

The aforementioned criteria for forming isolated N-type wells in Type-IItrench isolation can further be understood by analyzing theone-dimensional dopant profiles shown in FIG. 10, illustrating dopingconcentration N(x) versus depth x below the surface of the substrate.The depth x referenced to the substrate surface at x=0. For example,FIG. 10A illustrates a one-dimensional dopant profile corresponding tothe structure of at cross section 10A-10A in FIG. 9A with P+ region 435(represented by dopant profile 503), P-type isolated pocket 431B(represented by dopant profile 502), DN floor isolation region 432(represented by dopant profile 504), and P-type substrate 431A(represented by dopant profile 501). The net isolation thickness x_(net)is illustrated as the separation between shallow P+ region 435 and DNfloor isolation region 504. As shown, the dopant profile is definedperpendicular to the substrate surface, parallel to the trench 434. Thisparticular profile is measured sufficiently far from the trench that thepresence of the NI trench implant is not present.

FIG. 10B illustrates the dopant profile at cross section 10B-10B of FIG.9A adjacent to the trench 434, where the NI region 433 is present butwhere the shallow P+ region 435 is absent. Isolated P-type pocket 431Balong the trench (represented by dopant profile 512) sits atop NI region433 (represented by dopant profile 514) which in turn overlaps DN floorisolation region 432 (represented by dopant profile 513), formed inP-type substrate 431A (represented by dopant profile 511). The peakconcentration of the NI region 433 (profile 514) is actually formed atthe trench bottom, but lateral straggle from ricochets duringimplantation spread the implant laterally to a width slightly greaterthan the trench itself.

FIG. 10C illustrates the dopant profile at cross section 10C-10Cadjacent to the trench 444 of the isolation structure shown in FIG. 9Bwhere the N-type well 445 does not overlap onto the NI region 443 or theDN floor isolation region 442. As shown, DN floor isolation region 4422(represented by dopant profile 525) formed in P-type substrate 441A(represented by dopant profile 521) is overlapped by NI region 443(represented by dopant profile 526). N-type well 445 comprises an upperportion NW1 (represented by dopant profile 524) and a deeper portionNW1B (represented by dopant profile 523). The combined dopant profilesof upper portion NW1 and deeper portion NW1B indicate the overall dopantprofile of N-type well 445 is non-monotonic. As shown in FIG. 10C, themaximum doping concentration in deeper portion NW1B is greater than themaximum doping concentration in upper portion NW1. An intervening P-typepocket 441B (represented by dopant profile 522) separates the bottom ofdeeper portion NW1B (profile 523) from NI region 443 (profile 526) by adistance Δx₁. Also illustrated in FIG. 10C, the gap between deeperportion NW1B (profile 523) and DN floor isolation region 442 (profile525) in cross sections where NI region 443 is not present has a distanceΔx₂ with greater spacing than Δx₁.

FIG. 10D illustrates the dopant profile at cross section 10D-10Dadjacent to the trench 454 of the isolation structure shown in FIG. 9C,where the N-type well 455 just touches the NI region 453 but does notoverlap the DN floor isolation region 452 . As shown, DN floor isolationregion 452 (represented by dopant profile 532) formed in P-typesubstrate 451A (represented by dopant profile 531) is overlapped by NIregion 453 (represented by dopant profile 533). N-type well 455comprises an upper portion NW1 (represented by dopant profile 535) and adeeper portion NW1B (represented by dopant profile 534). No P-typeregion separates the bottom of deeper portion NW1B (profile 534) from NIregion 453 (profile 533), i.e. Δx₁≦0. In cross sections where NI region453 is not present, there is a gap=Δx₂ between deeper portion NW1B(profile 534) and DN floor isolation region 452 (profile 532) comprisingan intervening portion of P-type pocket 451B (not shown) of the sameconcentration as the substrate 451A.

FIG. 10E illustrates the dopant profile at cross section 10E-10Eadjacent to the trench 464 of the isolation structure shown in FIG. 9D,where the N-type well 465 substantially overlaps the NI region 463 butdoes not overlap the DN floor isolation region 462. As shown, DN floorisolation region 462 (represented by dopant profile 542) formed inP-type substrate 461A (represented by dopant profile 541) is overlappedby NI region 463 (represented by dopant profile 543) and NI region 463(profile 543) is overlapped by N-type well 465, comprising a deeperportion NW1B (represented by dopant profile 544) and an upper portionNW1 (represented by dopant profile 545). No portion of P-type pocket461B separates the bottom of deeper portion NW1B (profile 544) from NIregion 463 (profile 543), i.e. Δx₁<0. In cross sections where NI region463 is not present, there is a gap=Δx₂ between deeper portion NW1B(profile 544) and DN floor isolation region 462 (profile 542) comprisinga thin intervening portion of P-type pocket 461B (not shown) of the sameconcentration as the substrate 461A. Such a doping profile allows thedeeper portion NW1B of N-well 465 and DN floor isolation region 462 topunch through the thin portion of P-type pocket 461B at low biasconditions, essentially shorting the deeper portion NW1B of N-well 465to DN floor isolation region 462.

FIG. 10F illustrates the dopant profile at cross section 10F-10Fadjacent to the trench 474 of the preferred isolation structure shown inFIG. 9E where the N-type well 475 overlaps both the NI region 473 andthe DN floor isolation region 472. As shown, DN floor isolation region472 (presented by doping profile 552) formed in P-type substrate 471(presented by doping profile 551) is overlapped by NI region 473(presented by doping profile 555) and N-type well 475 comprising adeeper portion NW1B (presented by doping profile 553) and an upperportion NW1 (presented by doping profile 554). No P-type regionseparates the bottom of deeper portion NW1B (profile 553) from NI region473 (profile 555), i.e. Δx₁<<0. Furthermore, in cross sections where NIregion 473 is not present, no gap or intervening P-type region existsbetween deeper portion NW1B (profile 553) and DN floor isolation region472 (profile 552), i.e. Δx₂<0. In this configuration, all N-regions areelectrically shorted together to produce a low resistivity of N-typewell 475 for good CMOS latch-up suppression and snapback breakdownprevention, yet maintaining a low surface concentration needed to forlow threshold CMOS and high beta bipolar transistors. The entire Type-IItrench isolated well structure, formed without high-temperatureprocesses, is compatible with large diameter silicon wafers and may beused in conjunction with subsequent shallow trench isolation as well.

Another dopant profile 11A-11A, not adjacent to the trench 747 inpreferred isolation structure of FIG. 9E is illustrated by FIG. 11A,revealing that without the presence of NI region 473, the N-type well475 comprising an upper portion NW1 (represented by dopant profile 564)and a deeper more heavily concentrated portion NW1B (represented bydopant profile 563) still overlaps onto DN floor isolation region 472(represented by dopant profile 562) to form a continuous N-type regionof non-monotonic doping in substrate 471 (represented by dopant profile561).

FIG. 11B illustrates the problem illustrated in the structure of FIG.9F, where the upper portion NW1 of N-type well 485 (represented bydopant profile 573) is too deep and inadvertently forms a surface P-typelayer 481C (represented by dopant profile 574). The energy and depth ofupper portion NW1 (profile 573) does, however, overlap the deeperportion NW1B (represented by dopant profile 572), which in turnpreferably overlaps DN floor isolation region (represented by dopantprofile 571) to form a continuous N-type region. Implanting upperportion NW1 (profile 573) at a lower energy can prevent upper portionNW1 from overlapping of deeper portion NW1B (profile 572) of N-type well485 and adversely affect device operation, performance, and reliability.So if upper portion NW1 (profile 573) is too deep, a phantom P-typesurface layer 481C (profile 574) is formed and if implanted too shallow,low-resistance overlap to deeper well portion NW1B (profile 572) issacrificed instead.

The solution to this undesirable trade-off is to employ multiple dopant(e.g., phosphorus) implants to form the top portion NW1 as shown in FIG.11C. As shown, upper portion NW1 comprises two overlapping implants(represented by dopant profiles 585 and 584) which in turn overlapdeeper portion NW1B (represented by dopant profile 583) to form a threeimplant N-type well. This well, in turn, overlaps DN floor isolationregion (represented by dopant profile 582) all formed within P-typesubstrate (represented by dopant profile 581). While a three-implantwell is illustrated, higher in concentration with increasing depth, anynumber of implants of varying dose and energy can be used to form othernon-Gaussian non-monotonic doping profiles so long that the N-typeimplants adequately overlap.

The consideration for the relative depth of isolated N-type well regionswith respect to Type-II isolation structures is not as complex a factorwhen forming P-type wells, since the isolated pocket is already P-type.Because no floating P-type layer is formed regardless of the dopantprofile of the P-type well, the main concern is to avoid making theP-type well so deep that it counter-dopes the DN floor isolation regionor that the breakdown voltage between the P-type well and the DN floorisolation region is inadequate to support operation at the maximumsupply voltage.

Maintaining a lower dopant concentration in the P-type well increasesthe breakdown voltage between the P-type well and the N-type floorisolation region but may compromise certain NMOS characteristics. Toremedy this tradeoff, a separate deeper P-type implant, introduced at adepth shallower than the DN layer but overlapping the bottom of theP-type well, may be used as needed to lower the well resistivity andsuppress snapback.

This extra P-type implant may also serve other purposes, includingreducing the spacing between isolated pockets. FIG. 12A illustrates thea deep P-type region 603, herein referred to as a “DP” region, formedusing a high energy implantation into a P-type substrate 601 defined bya mask layer 604B and optionally by oxide layer 605 patterned using masklayer 604B. In one possible manufacturing flow, oxide layer 605 is grownon substrate 601 and then masked and etched. Substrate 601 is oxidizedto produce a thin pre-implant oxide layer 606. The deep N-type implantis then introduced to form DN floor isolation region 602, followed byusing photoresist 604B or any other thick mask material to define thelocation of the implanted DP region 603.

Use of a DP deep implanted region 614 is illustrated in FIG. 12B, wheretwo isolated P-type pockets 611B and 611C are isolated from surroundingP-type substrate 611A by Type-II trench isolation. Isolated pocket 611Bis surrounded by a concentric dielectric-filled trench 615A, a trenchbottom NI region 613A and a DN floor isolation region 612A. Isolatedpocket 611C is surrounded by a concentric dielectric-filled trench 615B,a trench bottom NI region 613B and a DN floor isolation region 612B. Asshown, DP region 614 is located between NI regions 613A and 613B toreduce the risk of punch-through breakdown. DN floor isolation regions612A and 612B are pulled back from the edge of the NI regions 613A and613B such that the lateral separation between DN floor isolation regions613A and 613B is greater than the lateral separation between NI regions613A and 613B. In this manner, isolated regions can be more closelypacked together to reduce chip size.

Alternative Type-II Isolated BCD Process

Aside from permitting a reduced space between isolated pockets, a DPimplant may be used for lowering the effective P-type well resistivityin low- and high-voltage NMOS formation. In FIG. 13A, for example, acomplementary pair of lightly doped drain (LDD) MOSFET transistors areformed and isolated by trench isolation.

The isolated PMOS 630A of FIG. 13A comprises an N-type well 636, an N+well contact region 639A, a P+ source region 640A, a P− source extension641A, a P− drain extension 641B and a P+ drain region 640B. The isolatedNMOS 630B of FIG. 13A comprises a P-type well 637, a P+ well contactregion 640C, an N+ source region 639B, an N− source extension 642A, anN− drain extension 642B and an N+ drain region 639C. Both NMOS 630B andPMOS 630A use gate oxide layers 644 with gates 646 and sidewall spacers643 to form the MOSFET channel. Contact to the regions of NMOS 630B andPMOS 630A is made through contact windows etched in an ILD layer 647,with a metal layer 649 and optional barrier metal layer 648 present inthe contact windows.

The N-type well 636 and P-type well 637 comprise non-monotonic dopingprofiles with at least surface regions NW2 and PW2 and deeper portionsNW2B and PW2B respectively. The wells are isolated from substrate 631Aby trench isolation comprising NI regions 633A and 633C overlapping DNlayer 632 and dielectric-filled trenches 635A and 635C. Trench 635Bcombined with NI region 633B isolates the PMOS 630A and NMOS 630B fromone another.

The bottom portion NW2B of N-type well 636 may overlap onto DN floorisolation region 632 or may leave a thin P-type pocket 631B interposedbetween the floor isolation region 632 and N-type well 636. In oneembodiment, P-type well 637 is shallower than N-type well 636 andtrenches 635A-635C. In this case a lightly-doped P-type pocket 631C ispresent between the bottom of P-type well 637 and the top of DN floorisolation region 632. Because well 637 and pocket 631C both compriseP-type silicon, no region is left electrically floating. Theintroduction of DP region 634A beneath P-type well 637 reduces theresistivity of this combined P-type region and improves the structure'sresistance to CMOS latch-up and NMOS snapback, particularly in highervoltage LDD NMOS as shown. The same high-energy boron implant can beused to form a DP region 634B between the isolated region shown in FIG.13A and another isolated region (not shown).

Another benefit of a DP region is to improve the electrical performanceof various PNP transistors. In FIG. 13B two types of PNP devices areshown using an implanted DP region.

In a PNP 650A, an N-type base 661 is formed within a P-type well 656Awhich contains a P+ region 660B as emitter and a N+ region 662A tofacilitate contact with N-type base 661. P-type well 656A, acting as thecollector is contacted through P+ regions 660A and 660C. PNP 650A isisolated from a P-type substrate 651A by a Type-II isolation structurecomprising dielectric-filled trenches 655, NI regions 659A and 659B, anda DN floor isolation region 652A. An N-type well (not shown) overlapssome portion of NI regions 659A and 659B, and is used to electricallybias DN floor isolation 652A.

In one embodiment, P-type well 656A does not overlap onto DN floorisolation region 652A. In such instances, a lightly doped P-type pocket651B is present between the bottom of P-type well 656A and the top of DNfloor isolation region 652A. Because P-well 656A and pocket 651B bothcomprise P-type dopant, no region is left electrically floating. Theintroduction of DP region 653A beneath P-type well 656A, however,reduces the resistivity of the combined P-type region and therebyreduces the collector resistance of PNP 650A.

In PNP 650B , an N-type well 670 forms the base region and contains a P+region 660E as emitter and a N+ regions 662B and 662C to facilitatecontact with the base region. A P-type pocket 651C, acting as thecollector further contains P-type wells 656B and 656C, contacted throughP+ regions 660D and 660F. PNP 650B is isolated from P-type substrate651A by a Type-II isolation structure comprising dielectric-filledtrenches 656, NI regions 659C and 659D, and a DN floor isolation region652B. NI regions 659C and 659D are contacted by an N-well, for example,outside the plane of FIG. 13B.

In a preferred embodiment of PNP 650B, N-type well 670 does not overlaponto DN floor isolation region 652B, such that a P-type pocket 651C ispresent between the bottom of N-well 670 and the top of DN floorisolation region 652B. If P-type pocket 651C is sufficiently thin,N-type well 670 may punch-through to DN floor isolation region 652B,electrically shorting N-type well 670 to DN floor isolation region 652B.The introduction of a DP region 653B beneath N-type well 670 suppressespunch-through and improves the isolation between the base (N-type well670) and the isolation regions (DN floor isolation region 652B and NIregions 659C and 659D). In addition, DP region 653B reduces theresistivity of the P-type regions enclosed by the isolation structureand thereby reduces the collector resistance of PNP 650B.

By optimizing implant energy of DP region 653B for a depth shallowerthan the DN floor isolation region 652B, DP region 653B is capable ofimproving both NPN and PNP bipolar device performance, such as thedevices shown in FIGS. 3B and 3C, reducing the propensity for CMOSlatch-up and NMOS snapback breakdown, and reducing the spacing betweenisolated wells.

Non-Isolated BiCMOS in Type-II Isolated BCD Process.

While the process of this invention allows the integration of fullyisolated devices, its modularity allows designers to skip the NI and DNimplants when full isolation is not needed. In so doing, the fullisolated BCD device arsenal reverts to CMOS with NPN bipolartransistors, i.e. into a BiCMOS process with fewer masks and lower cost.The modularity of the architecture further means the electricalcharacteristics of the CMOS remains unaltered whether the CMOS isisolated or non-isolated. The electrical characteristics of the NPNremain unaltered except that the DN layer reduces collector resistanceof the isolated version. The NPN is still “self-isolating,” just likethe PMOS devices, since it is formed inside an N-type well thatnaturally forms a reverse-biased junction to the surrounding P-typesubstrate.

FIGS. 14A-14E illustrate several NMOS transistors formed withconventional shallow trench isolation (STI). Without the completeisolation of the DN and NI regions, described above, the P-type wellthat serves as the body region of these NMOS devices is shorted to theP-type substrate. These non-isolated devices may be formed either byremoving the NI and DN implants from the particular device instancethereby mixing isolated and non-isolated devices on the same integratedcircuit, or by skipping those process steps.

FIG. 14A shows a cross-sectional view of a symmetrically-drifted NMOS700, i.e. a device having a drifted source and a drifted drain. NMOS 700comprises a P-type well 701, a P+ contact region 703, N+ source anddrain regions 704A and 704B, a gate oxide layer 706, a polysilicon gate708, a gate silicide 709 and sidewall spacers 707. NMOS 700 includes N−drifted source and drain regions 705B and 705C having lengths L_(S1) andL_(D1) respectively and which conduct current in the on state, andpassive N− drift terminations 705A and 705D of lengths L_(S2) and L_(D2)which prevent surface breakdown of the N+ junctions but do not carrycurrent. The lengths of drift regions L_(S1) and L_(D1) may be optimizedindependent of the lengths of passive termination lengths L_(S2) andL_(D2). In some embodiments, the drift regions may also be formed bydifferent process steps than the passive terminations, such that theirdoping profiles may also be independently optimized.

P-type well 701 preferably comprises an upper portion PW2 and a deeperportion PW2B where the deeper portion PW2B has a higher dopantconcentration than the upper portion PW1.

NMOS 700 is bounded on its periphery by a dielectric-filled trench 702.Contact to NMOS 700 through ILD layer 710 is facilitated by a barriermetal layer 711 and an interconnect metal layer including drain contact712, source contact 809, and well contact 810.

FIG. 14B shows a cross-sectional view of an asymmetrically drifted NMOS720, i.e. a device having a drifted drain and but only a short,sidewall-spacer-defined drifted source. NMOS 720 comprises a P-type well721, a P+ contact region 723, N+ source and drain regions 724A and 724B,a gate oxide layer 726, a polysilicon gate 728, a gate silicide 729 andsidewall spacers 727. NMOS 720 also includes a source extension 725Athat is defined by the sidewall spacer 727, an artifact of theconventional LDD CMOS process. A mask-defined drain extension 725B oflength L_(D1) conducts current in the on state, while a passive N− drifttermination 725C of length L_(D2) prevents surface breakdown of the N+drain junction but does not carry current. The lengths and dopingconcentrations and profiles of source extension 725A, drain extension725B, and drift termination 725C may be optimized independently.

FIG. 14C shows a cross-sectional view of an asymmetrically drifted NMOS740. NMOS 740 comprises a P-type well 741, a P+ contact region 743, N+source and drain regions 744A and 744B, a gate oxide layer 746, apolysilicon gate 748, a gate silicide 749 and sidewall spacers 747. Thedevice includes a source extension 745A that is defined by the sidewallspacer 747, an artifact of the conventional LDD CMOS process. Amask-defined drain extension 745B having length L_(D1) conducts currentin the on-state. Unlike the devices of FIGS. 14A and 14B, no N− driftregion is present between drain 744B and trench 742. Other features ofNMOS 740 are similar to those of NMOS 720, described above.

FIG. 14D shows a cross-sectional view of a symmetric LDD NMOS 760, fullyself-aligned with no mask defined drift lengths. Unlike NMOS 740,described above, the source and drain extensions 765A and 765B havelengths determined by the length of sidewall spacers 767. Other featuresof NMOS 760 are similar to those of NMOS 740, described above.

FIG. 14E illustrates an asymmetrically drifted NMOS 780. Unlike NMOS720, the drain region 784B of NMOS 780 is entirely concentricallysurrounded by a gate 788 and source region 784A, 784C. NMOS 780comprises a P-type well 781, a P+ contact region 783, a ring shaped N+source region 784A, 784C, a central N+ drain region 784B, a gate oxidelayer 786, a ring shaped polysilicon gate 788, a gate silicide 789 andsidewall spacers 787. NMOS 780 also includes a source extension 785A,785D, defined by sidewall spacer 787, and a mask defined N− drainextension 785B, 785C of radial length L_(D1). The N− drain extension785B, 785C completely surrounds N+ drain region 784B on all sides in aring shaped or annular geometry. In this embodiment, no lightly dopedregion is present between N+ source 784C and trench 782. Other featuresof NMOS 780 are similar to those of NMOS 720.

FIGS. 15A-15E illustrate in plan view the non-isolated NMOS transistorsshown in cross-section in FIGS. 14A-14E. FIG. 15A is a plan view of NMOS700, shown in FIG. 14A, with trench 702 in the form of a ring enclosingP+ contact region 703 and a well contact 810, N+ source region 704A anda source contact 809, N+ drain region 704B and drain contact 712,polysilicon gate 708 with gate contact 803. As shown, N+ source region704A is spaced from the gate by the mask defined distance L_(S1),determined by the relative positioning of the N+ and polysilicon gatemasks, and from the edge of trench 702 by the distance L_(S2). The N+source region 704A is also spaced apart from P+ contact region 703 bythe distance L_(S2) plus the width of a gap 806. N+ drain region 704B isspaced from the gate 708 by a mask defined distance L_(D1), determinedby the relative positioning of the N+ and polysilicon gate masks, andfrom trench 702 by a distance L_(D2). FIG. 14A is taken at cross section14A-14A, shown in FIG. 15A.

FIG. 15B is a plan view of NMOS 720, shown in FIG. 14B, with trench 722in the form of a ring enclosing P+ contact region 721 and a well contact830, N+ source region 724A and a source contact 829, N+ drain region724B and a drain contact 732, polysilicon gate 728 with a gate contact823. As shown, N+ source region 724A abuts gate 728. (The sourceextension 725A formed by the sidewall spacer 727 is not shown in FIG.15B.) Source region 724A is spaced apart from P+ contact region 721 by agap 826. N+ drain region 724B is spaced from gate 728 by a mask-defineddistance L_(D1), determined by the relative positioning of the N+ andpolysilicon gate masks, and from trench 722 by a distance L_(D2). FIG.14B is taken at cross section 14B-14B, shown in FIG. 15B.

FIG. 15C is a plan view of NMOS 740, shown in FIG. 14C, with trench 742in the form of a ring enclosing P+ contact region 743 and a well contact850, N+ source region 744A and a source contact 849, N+ drain region744B and a drain contact 752, polysilicon gate 746 with a gate contact843. As shown, N+ source region 744A abuts gate 746. (The sourceextension 745A formed by the sidewall spacer 748 is not shown in FIG.15C.) Source region 744A is spaced apart from P+ contact region 743 bythe width of a gap 846. N+ drain region 744B is spaced from gate 746 bya mask-defined distance L_(D1), determined by the relative positioningof the N+ and polysilicon gate masks, and abuts trench 742 on theremaining three sides. FIG. 14C is taken at cross section 14C-14C, shownin FIG. 15C.

FIG. 15D is a plan view of NMOS 760, shown in FIG. 14D with trench 762in the form of a ring enclosing P+ contact region 763 and a well contact870, N+ source region 764A and a source contact 869, N+ drain region764B and a drain contact 868, polysilicon gate 768 with a gate contact863. As shown, N+ source region 764A abuts gate 768. (The sourceextension 765A formed by the sidewall spacer is not shown in FIG. 15D.)Source region 764A is spaced apart from P+ contact region 763 by a gap866. N+ drain region 764B abuts gate 768. (The drain extension 765Bformed by the sidewall spacer 767 is not shown in FIG. 15D.) N+ drainregion 764B also abuts trench 762 on its remaining three sides. FIG. 14Dis taken at cross section 14D-14D, shown in FIG. 15D.

FIG. 15E is a plan view of NMOS 780, shown in FIG. 14E, with trench 782in the form of a ring enclosing P+ contact region 783 and a well contact890, a ring-shaped N+ source region 784A,784C and source contacts 792,an enclosed N+ drain region 784B and a drain contact 888, polysilicongate 788 in the form of a ring 882 with a polysilicon gate contact 883.As shown, N+ source region 784A,784C surrounds and abuts gate ring 882.(The source extensions 785A,785D formed by the sidewall spacers are notshown in FIG. 15E.) Source region 784A is spaced apart from P+ contactregion 783 by a gap 886. N+ drain region 784B is surrounded by andspaced from gate 788 by a mask-defined distance L_(D1), determined bythe relative positioning of the N+ and polysilicon gate masks. FIG. 14Eis taken at cross section 14E-14E, shown in FIG. 15E.

Type-V Isolated BCD Process

Another preferred embodiment of the present invention incorporates adeep trench with an insulating sidewall and a conductive center portionextending from the silicon surface to the bottom of the trench, wherethe conductive center electrically contacts the NI region beneath thebottom of the trench. The insulating sidewall may comprise silicondioxide, silicon nitride, oxy-nitride film or sandwich, or any othernon-conducting dielectric. The thickness of the sidewall may range from100 Å to 3000 Å, depending on the trench width. The conductive materialis preferably in-situ doped polysilicon, but may alternatively compriseother conductive materials such as a high-temperature or refractorymetal.

Compared to the Type-II isolation, described above, the addition of aconductive material embedded in the isolation trenches of Type-Visolation offers several advantages. First, the vertical resistance fromthe top surface of the substrate to the NI and DN regions can be greatlyreduced. Moreover, electrical contact from the top surface of thesubstrate to the NI and DN regions can be made via the isolation trench,obviating the need for an N-type well to connect the NI and DN layers tothe substrate surface. This reduces the surface area required for thevertical DN contacts, which allows more contacts to be used without anunacceptable increase in the total chip area.

FIG. 16A illustrates a cross-sectional view of a floating CMOS 900A,900Band a quasi-vertical N-channel DMOS 900C isolated using Type Visolation, fabricated in a common P-type substrate 901. The PMOS 900Aand NMOS 900B are enclosed by a Type V isolation structure comprising adeep implanted DN floor isolation region 902A, a trench 924A comprisinga dielectric layer 906 and a trench conductive layer 907, and NI regions904 located at the bottom of the trench 924A. Within this isolationstructure, an N-type well 909A is used to form the body region of PMOS900A. The N-type well 909A may also used to contact the DN floorisolation region 902A, either directly by overlapping the DN region902A, or indirectly by contacting and overlapping the NI region 904.However, contact between N-well 909A and NI 904 is not required inType-V isolation since the NI and DN layers are contacted through thetrench conductive region 907. In a preferred embodiment, the dopingprofile of the N-type well 909A is non-monotonic, comprising at least atop portion NW1 and a deeper portion NW1B and preferably formed using aphosphorus chain implant of differing energies and doses. In the eventthat the bottom of N-type well 909A does not overlap onto DN region902A, an intervening P-type layer 905A will result. P-type layer 905A isfloating and has no substantial electrical effect on the operation ofCMOS 900A,900B.

Also within the isolation region bounded by DN floor isolation 902A, aP-type well 908 is used to form the body region of NMOS 900B. In apreferred embodiment, the doping profile P-type well 908 isnon-monotonic comprising at least a top portion PW1 and a deeper portionPW1B and preferably formed using a boron chain implant of differingenergies and doses. Should P-type well 908 not overlap onto DN isolationfloor layer 902A, an intervening P-type layer 905B will result. Sincelayer 905B is also P-type, it is electrically shorted to the potentialof P-type well 908.

N-type well 909A and P-type well 908 may be placed adjacent each otherwith no intervening trench isolation. However, in a preferredembodiment, N-well 909A and P-well 908 are separated by adielectric-filled trench 923, which greatly reduces the susceptibilityto latch-up. By using only dielectric fill for trench 923, the spacingbetween PMOS 900A and NMOS 900B may be smaller than if a dielectric andconductive filled trench such as trench 924A was used. In anotherembodiment, the intervening trench between N-well 909A and P-well 908may be formed with a conductive layer inside, similar to trench 924A,which requires more space but provides an additional contact to DN floorisolation region 902A.

Within N-type well 909A, PMOS 900A comprises a P+ source region 911A anda drain region 911B, a sidewall spacer 915 and an underlying LDD 912, apolysilicon gate 918 with silicide 917 located atop first gate oxidelayer 916, where the first gate oxide layer 916 has a thickness x_(ox1).Within P-type well 908, NMOS 900B comprises an N+ source region 910A andan N+ drain region 910C, sidewall spacer 915 and underlying LDD 913A, apolysilicon gate 918 with silicide 917, where the gate 918 is alsolocated atop first gate oxide layer 916.The thickness of gate oxidelayer 916, x_(ox1), may be optimized for the best overall performanceand voltage capability for both PMOS 900A and NMOS 900B. The polysiliconlayer used to form gate 918 may comprise N-type doping for both NMOS900B and PMOS 900A, or alternatively the PMOS 900A may comprise P-typedoped polysilicon.

Electrical connection to the CMOS devices 900A,900B is facilitatedthrough contact openings etched through an ILD layer 919 with a metallayer 921 and barrier metal layer 922. Contact to the DN floor region902A is made by an ISO electrode, trench conductive layer 907, and NIregion 904.

The quasi-vertical N-channel transistor 900C includes a Type V isolatedpocket comprising a DN floor isolation region 902B, NI region 904, and atrench 924B containing a dielectric layer 906 and a conductor 907. AnN-Drift (ND) region 925 extends from a P-type body region 914 iscontacted through P+ contact regions 911D and 911E. N+ source regions910D and 911E are preferably shorted to the P+ contact regions 911D and911E, as shown. A gate 920 comprising polysilicon layer and optionalsilicide layer 921, sits atop a gate oxide layer 922. Source extensionregions 913B, a consequence of oxide sidewall spacers 915, may beeliminated if the gate fabrication steps for transistor 900C are notshared with the gate fabrication steps for PMOS 900A and NMOS 900B. Inthe on-state, a channel region is formed across body regions 914 beneathgate oxide layer 922. N-Drift region 925 connects the channel region toDN floor isolation region 902B, which serves as a buried drain. Theconductive layer in trench 924B provides electrical contact between adrain electrode 926 and NI region 904 and through NI region 904 to DNfloor isolation region 902B.

The cross-sectional view of transistor 900C illustrates a single cellhaving two source regions 910D,910E and two body regions 914 sharing acommon drain (DN floor isolation region 902B). An actual transistor maycomprise many cells or stripes in a many cell or multi-stripe device.

FIG. 16B shows a cross-sectional view of three bipolar transistors,fabricated in a P-type substrate 941 and isolated using Type Visolation. These bipolar devices, and their component Type V isolationstructures, wells, implants, shallow implants and interconnections canbe fabricated monolithically and simultaneously, in the same substrate.

An NPN 940A uses a dedicated PB base implant 948, while NPN 940Butilizes as its base a P-type well 947A, which is fabricated in the sameprocess step as P-well 908 in NMOS 900A. In NPN 940A, a DN floorisolation region 942A, NI regions 960A and first N-type well 946electrically form the collector, shorted to one another through the NIregions 960A and a conductor 945 within a trench 960. A trenchdielectric layer 944 isolates conductor 945 from substrate 941.

FIG. 16B shows an intervening P-type floating layer 961A between N-typewell 946 and DN floor isolation region 942A. P-type floating layer maypreferably be eliminated by overlapping the bottom of N-type well 946onto DN floor isolation region 942A. In a preferred embodiment, N-typewell 946 contains a non-monotonic doping profile, having a surfaceportion NW1 having a lighter doping concentration than the deeper buriedNW1B portion. The surface portion NW1 reduces depletion spreading in PBbase 948, thereby increasing the Early voltage V_(A) of NPN 940A, whilethe deeper portion NW1B of N-type well 946, in combination with the DNlayer 942A, helps to reduce collector resistance. The collectorresistance is higher if N-type well 946 does not overlap onto DN region942A. In a preferred embodiment, the doping profile of the first N-typewell 946 is formed using a phosphorus chain implant of differingenergies and doses. Top-side collector contact is facilitated throughthe conductive portion 945 of trench 960; contact to the base isachieved through a shallow P+ contact region 951A; and an N+ region 950Aforms the emitter. The Type V isolation structure—which includes trench960 with dielectric layer 944, and conductor 945 contacting theunderlying NI region 960A, and DN floor isolation region 942A—is alsopart of the collector (except for dielectric layer 944).

Contact to the emitter, base and collector of NP 940A is achievedthrough a metal layer 954 and a barrier metal layer 953 extendingthrough contact windows formed in an ILD layer 952. A shallow trenchisolation (not shown) may be used to separate N+ region 950A (theemitter) from P+ region 951A, provided that the shallow trench is notdeeper than PB base implant 948. A polysilicon emitter (not shown) canbe substituted for N+ region 950A as the emitter.

NPN 940B is similar to NPN 940A, described above, except that a P-well947A replaces PB base implant 948 as the base of the NPN, and there isno N-well comparable to N-type well 946 included between the base(P-well 947A) and DN floor isolation region 942B.

P-type well 947A may comprise the same doping profile as P-welloptimized for integrating a submicron NMOS, e.g., P-type well 908 inNMOS 900B (FIG. 16A). Using this approach, the performance of NPN 940Bmay be compromised, as compared to NPN 940A, with the tradeoffsadversely impacting current gain, breakdown voltage, and frequencyresponse. In contrast, with its own dedicated P-type base implant 948,the performance of NPN 940A can be independently optimized with minimalcompromises necessary.

PNP 940C is also fabricated in P-type substrate 941, using a dedicatedNB base 949. A P+ region 951C forms the emitter of PNP 940C. A P-typewell 947B forms the collector and preferably has a non-monotonic dopantprofile comprising at least a top portion PW1 and a deeper portion PW1B,preferably formed using a boron chain implant of differing energies anddoses. An intervening P-type layer 961C between P-type well 947B and aDN floor isolation region 942C may advantageously provide a higherbreakdown voltage between the collector and the Type-V isolationstructure. However, P-type layer 961C may be very thin and may not evenexist if the bottom of the deep portion PW1B of P-type well 947Boverlaps onto DN floor isolation region 942C. In a preferred embodiment,the collector and isolation will be connected together by ametallization layer, such that they have the same electrical potential.The top portion PW1 of P-well 947B reduces depletion spreading in NBbase 949, thereby increasing the Early voltage of PNP 940C, while thedeep portion PW1B of P-type well 947B helps reduce collector resistance.

A polysilicon emitter (not shown) can be substituted for P+ region 951Cas the emitter of PNP 940C.

Top-side contact to the collector is facilitated through a P+ contactregion 951D, contact to the DN floor isolation region 942C is providedby a trench conductor 945C, and contact to the base is achieved throughan N+ contact region 950C. P+ region 951C forms the emitter. The Type-Visolation structure includes a trench 960, including a conductor 945 anda dielectric layer 944, an underlying NI region 960C, and DN isolationregion 942C, which together circumscribe and enclose the entire PNP940C. Contact to the emitter, base and collector of PNP 940C is achievedthrough a metal layer 954 and a barrier metal layer 953 extendingthrough contact windows formed in an ILD layer 952.

Deep implanted DP regions 943A and 943B may be present between DN floorisolation regions 942A, 942B, and 942C to suppress leakage and allowcloser spacing.

Combined Inventive Matter

While specific embodiments of this invention have been described, itshould be understood that these embodiments are illustrative only, andnot limiting. Many additional or alternative embodiments in accordancewith the broad principles of this invention will be apparent to those ofskill in the art.

For example, N-type wells used in any device may be spaced apart fromthe isolation trench, abut the isolation trench on either side, or besurrounded by the trench on both sides. Any device employing Type IIisolation shown may be adapted to Type V isolation. N-type and P-typewells may include an intervening trench or abut one another. Isolatedand non-isolated devices may be mixed in the same integrated circuit.Devices may use a relatively deep trench to implement Type II or Type-Visolation, but may also incorporate shallow trench isolation, especiallyin high-density CMOS areas used for digital circuitry. Any CMOStransistor employing a sidewall-spacer-defined drift (LDD) region can bemodified to include a mask-defined drift region.

1. A lateral MOSFET comprising: a semiconductor substrate of a firstconductivity type, the substrate not comprising an epitaxial layer; agate formed atop a gate dielectric layer over a surface of thesubstrate; a source region of a second conductivity type opposite to thefirst conductivity type formed in the substrate, the source region beinglocated adjacent the surface of the substrate on one side of the gate; adrain region of the second conductivity type formed in the substrate,the drain region being located adjacent the surface of the substrate ona side of the gate opposite to the source region; a drift region of thesecond conductivity type formed in the substrate, the drift regionhaving a doping concentration less than a doping concentration of thedrain region, the drift region being located adjacent the drain regionand extending under the gate, a body region of the first conductivitytype formed in the substrate, the body region having a dopingconcentration greater than a doping concentration of the substrate, thebody region being located adjacent the source region and extending underthe gate, a filled trench laterally surrounding the source region, thefilled trench comprising a dielectric material; and a sidewall region ofthe second conductivity type in the substrate abutting a bottom of thetrench and extending downward into the substrate.
 2. The lateral MOSFETof claim 1 wherein the body region comprises at least an upper portionand a lower portion, the upper portion being located above the lowerportion, the lower portion having a maximum doping concentration greaterthan a maximum doping concentration of the upper portion.
 3. The lateralMOSFET of claim 1 wherein a portion of the substrate separates the driftregion from the body region.
 4. The lateral MOSFET of claim 1 comprisingan implanted region of the first conductivity type located in thesubstrate at a depth greater than a bottom of the body region, theimplanted region having a doping concentration greater than a dopingconcentration of the substrate.
 5. The lateral MOSFET of claim 1 whereinthe drain region is laterally surrounded by the source region.
 6. Thelateral MOSFET of claim 1 comprising a sidewall region of the secondconductivity type abutting a bottom of the trench and extending downwardinto the substrate.
 7. The lateral MOSFET of claim 6 comprising a wellof the second conductivity type, the well of the second conductivitytype extending downward from the surface of the substrate andoverlapping the sidewall region.
 8. The lateral MOSFET of claim 7wherein the well of the second conductivity type and the sidewall regionare biased at a voltage such that a P-N junction between the sidewallregion and adjacent portions of the substrate is reverse-biased.
 9. Thelateral MOSFET of claim 5 comprising a sidewall region of the secondconductivity type abutting a bottom of the trench and electricallyconnected to the conductive material.
 10. The lateral MOSFET of claim 9wherein the conductive material and the sidewall region are biased at avoltage such that a P-N junction between the sidewall region andadjacent portions of the substrate is reverse-biased.
 11. The lateralMOSFET of claim 1 comprising an outer ring of the first conductivitytype laterally surrounding the trench, the outer ring having a dopingconcentration greater than a doping concentration of the substrate. 12.The lateral MOSFET of claim 9 comprising a second implanted region ofthe first conductivity type located in the substrate at a depth greaterthan a bottom of the outer ring, the implanted region being locatedbelow and spaced apart from the ground ring and having a dopingconcentration greater than the doping concentration of the substrate.13. A lateral MOSFET comprising: a semiconductor substrate of a firstconductivity type, the substrate not comprising an epitaxial layer; asource region of a second conductivity type opposite to the firstconductivity type; a drain region of the second conductivity type; agate formed atop a gate dielectric layer over a surface of thesubstrate, the gate disposed between the source region and the drainregion; a drift region of the second conductivity type extendinglaterally from the drain region toward the source region, a filledtrench laterally surrounding the source region, the filled trenchcomprising a dielectric material; a sidewall region of the secondconductivity type abutting a bottom of the trench and extending downwardinto the substrate; an implanted region of the first conductivity typedisposed in the substrate at a depth greater than a bottom of the sourceregion, the implanted region having a doping concentration greater thana doping concentration of the substrate; and an outer ring of the firstconductivity type laterally surrounding the trench, the outer ringhaving a doping concentration greater than a doping concentration of thesubstrate.
 14. The lateral MOSFET of claim 13 wherein the filled trenchfurther comprises a conductive material in electrical contact with thesidewall region.
 15. The lateral MOSFET of claim 14 wherein theconductive material and the sidewall region are biased at a voltage suchthat a P-N junction between the sidewall region and adjacent portions ofthe substrate is reverse-biased.
 16. The lateral MOSFET of claim 13comprising a well of the second conductivity type, the well of thesecond conductivity type extending downward from the surface of thesubstrate and overlapping the sidewall region.
 17. The lateral MOSFET ofclaim 16 wherein the well of the second conductivity type and thesidewall region are biased at a voltage such that a P-N junction betweenthe sidewall region and adjacent portions of the substrate isreverse-biased.
 18. The lateral MOSFET of claim 1 wherein the filledtrench further comprises a conductive material.